Heating Element Temperature Estimation via Current Measuring Resistor
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Solution Overview
Problem
The increasing number of heaters in electrostatic chucks for substrate treatment complicates the wiring structure and makes it difficult to install temperature sensors, hindering precise temperature control of substrates during semiconductor manufacturing processes.
Innovation Solution
A substrate treating apparatus that estimates the temperature of heating elements using a current measuring resistor on the power supply or return line, eliminating the need for temperature sensors, and employs a control unit to feedback control the heating elements based on estimated temperatures.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If the number of heaters in the electrostatic chuck is increased to improve substrate temperature control precision, then temperature control precision is improved, but device complexity increases due to complicated wiring structure and difficulty in installing temperature sensors
Solution Approach 1:
The patent extracts the temperature sensing function from separate temperature sensors and integrates it into the heating elements themselves. By measuring the resistance of each heating element and using the known relationship between resistance and temperature, the system determines heating element temperatures without requiring separate temperature sensors, thus simplifying the wiring structure while maintaining temperature control precision
Solution Approach 2:
The heating elements are given a dual function: they both heat the substrate and serve as temperature sensors. By measuring the resistance of the heating elements, the system can determine their temperature, eliminating the need for separate temperature sensing components and reducing device complexity
2Measurement precision
If the number of temperature sensors is increased to match the number of heaters for accurate temperature sensing, then temperature measurement accuracy is improved, but ease of manufacture deteriorates due to installation difficulties
Solution Approach 1:
The patent removes the need for separate temperature sensors by extracting the temperature measurement capability from dedicated sensing components and embedding it within the heating elements themselves through resistance measurement, thereby eliminating installation difficulties associated with mounting multiple temperature sensors
Solution Approach 2:
The heating elements perform self-diagnosis by measuring their own resistance to determine their temperature. This self-service approach eliminates the need for external temperature sensors and simplifies the manufacturing and installation process while maintaining accurate temperature measurement
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach allows for efficient and precise temperature control of substrates without the need for temperature sensors, simplifying the installation and reducing mechanical and cost-related complexities, while maintaining treatment accuracy and uniformity.
Implementation Method 1
at least one heating element adjusting a temperature of the substrate; a power source generating a power applied to the at least one heating element; a current measuring resistor provided on the power supply line or the power return line and used for estimating a temperature of the at least one heating element
Data Source
AI summary
The inventive concept provides a substrate treating apparatus. The substrate treating apparatus includes a chamber having a treating space; and a support unit configured to support and heat a substrate in the treating space, and wherein the support unit includes: at least one heating element for adjusting a temperature of the substrate; a power source for generating a power applied to at least one heating element; a power supply line for transmitting the power generated by the power source to the at least one heating element; a power return line for grounding the at least one heating element; and a current measuring resistor provided on the power supply line or the power return line and used for estimating a temperature of the at least one heating element.