Heating Element Support Structure for Thermal Distortion Control
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Solution Overview
Problem
Conventional substrate processing apparatuses face issues with heating element stability due to thermal distortion, leading to potential short circuits and reduced operational life, as the supporting structures fail to regulate relative displacement and prevent direct contact between heating elements and other components.
Innovation Solution
A substrate processing apparatus with a heating module featuring thermal insulator materials that support heating elements with slits, projections, and pins with enlarged portions, ensuring proper alignment and spacing to prevent thermal distortion and direct contact, thereby enhancing the operational life and uniform heating.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If heating elements are supported by conventional supporting structures, then the heating elements can be installed and function, but thermal distortion causes relative displacement and direct contact between heating elements and other components, reducing operational life
Solution Approach 1:
The patent introduces an intermediary supporting structure consisting of insulating material with specifically designed supporting portions that mediate between the heating elements and the furnace environment. This intermediary structure prevents direct contact between heating elements and other components while accommodating thermal expansion through regulated relative displacement, thereby resolving the contradiction between operational life and structural stability.
Solution Approach 2:
The patent changes the physical parameters of the supporting structure by using insulating material with specific mechanical and thermal properties. The supporting portions are designed to allow regulated relative displacement within specific ranges, transforming the rigid support concept into a flexible system that adapts to thermal expansion while maintaining stability and preventing harmful contact.
2Ease of manufacture
If heating elements are freely supported without constraints, then installation is simple, but thermal distortion leads to buckling, twisting, and fracturing of heating elements
Solution Approach 1:
The patent employs a flexible supporting structure made of insulating material that can deform and adapt to thermal expansion. The supporting portions are designed to provide gentle constraints rather than rigid fixation, allowing the heating elements to expand freely while preventing excessive distortion. This flexible support system maintains structural strength without complicating installation.
3Productivity
If heating elements are closely arranged to maximize space utilization, then productivity increases, but direct contact between heating elements during thermal expansion causes short circuits
Solution Approach 1:
The insulating material serving as the supporting structure acts as an electrical intermediary between closely arranged heating elements. This intermediary maintains electrical insulation even when heating elements are in close proximity, allowing maximum space utilization while preventing short circuits during thermal expansion.
Solution Approach 2:
The patent uses composite insulating material that combines electrical insulation properties with mechanical support capabilities. This composite material enables closely arranged heating elements to maintain both electrical isolation and mechanical stability, resolving the contradiction between productivity and reliability.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively prevents heating element buckling, twisting, and fracturing, ensuring precise temperature control and extended operational life by maintaining the heating elements' structural integrity and preventing direct contact with other components during thermal expansion.
Implementation Method 1
thermal insulator materials that support heating elements with slits, projections, and pins with enlarged portions
Implementation Method 2
heating element stability due to thermal distortion, leading to potential short circuits and reduced operational life
Data Source
AI summary
A substrate treating device comprising a treatment chamber for storing and treating substrates and a heating device having a heating element and a heat insulator and heating the substrates in the treatment chamber by the heating element. The heating element is so formed that only its one end is held by a holding part, and a projection projected to the treatment chamber side at the intermediate part of the heating element and positioned in proximity to or in contact with the heating element is formed on the heat insulator. A pin with an enlarged part is passed through the heating element and the heat insulator at the intermediate part of the heating element and the enlarged part is positioned in proximity to or in contact with the heating element. The plurality of projections may be formed on the heat insulator and the pins may be disposed between these plurality of projections.