Heating Power Supply Waveform Design for Low-Noise Inspection
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Solution Overview
Problem
Existing power supplies for semiconductor inspection apparatuses face challenges in achieving high efficiency and reducing noise, particularly in heating mechanisms that require precise temperature control and minimal noise interference for accurate measurement signals.
Innovation Solution
A power supply system utilizing a switching amplifier with an input device generating a differentiable periodic waveform of 1 kHz or less, combined with a series resonant circuit and low pass filter, to enhance efficiency and reduce noise, ensuring accurate temperature control and minimal radiation noise.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Loss of energy
If a conventional power supply is used for the heating mechanism, then the structure is simple, but the efficiency is low and noise is high
Solution Approach 1:
The patent changes the waveform parameter from conventional AC power to a differentiable periodic waveform (such as sine wave) with frequency of 1 kHz or less. This parameter change enables the heating mechanism to achieve high efficiency while reducing noise, as the smooth waveform transitions avoid abrupt changes that generate electromagnetic interference and improve power conversion efficiency in the switching amplifier.
Solution Approach 2:
The patent employs periodic action by using a differentiable periodic waveform (frequency ≤ 1 kHz) to drive the heating mechanism. This periodic waveform with controlled frequency achieves efficient heating while the periodic nature allows for optimized power delivery cycles, improving overall system efficiency and reducing noise compared to conventional continuous AC power supply.
2Object-affected harmful factors
If a conventional power supply is used for the heating mechanism, then the device complexity is low, but noise is high which interferes with measurement signals
Solution Approach 1:
The patent changes the power waveform parameter to a differentiable periodic waveform with frequency of 1 kHz or less. This parameter change fundamentally reduces noise generation by eliminating abrupt waveform transitions and high-frequency components that cause electromagnetic interference, thereby protecting measurement signal accuracy while maintaining relatively simple device structure.
Solution Approach 2:
The patent substitutes the conventional AC power supply system with a switching amplifier system that generates controlled differentiable periodic waveforms. This substitution replaces the traditional mechanical/electrical power delivery mechanism with a more sophisticated electronic control system that actively manages waveform characteristics to minimize noise and electromagnetic interference.
3Productivity
If a switching amplifier is used with differentiable periodic waveform, then efficiency is high and noise is reduced, but the device complexity increases
Solution Approach 1:
The patent changes the operating parameters of the power supply system by using a differentiable periodic waveform with frequency ≤ 1 kHz. This parameter optimization enables the switching amplifier to operate in a high-efficiency regime while the low frequency requirement simplifies the filtering and control circuitry, partially offsetting the inherent complexity of switching amplifier architecture.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution achieves high efficiency and reduced noise, improving the accuracy of measurement signals and temperature control in semiconductor inspection processes, addressing the limitations of conventional power supplies.
Implementation Method 1
a switching amplifier configured to amplify the input signal from the input device and output the amplified signal
Implementation Method 2
a power supply for supplying a power to a heating mechanism used for heating a measurement target
Data Source
AI summary
A power supply for supplying a power to a heating mechanism used for heating a measurement target that emits a measurement signal includes an input device configured to output an input signal that reflects a control signal in a differentiable periodic waveform having a frequency of 1 kHz or less. The power supply includes a switching amplifier configured to amplify the input signal from the input device and output the amplified signal.