Heating Unit Dynamic Series Parallel Switching for Load Factor
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Solution Overview
Problem
Existing heating units in semiconductor and flat display panel manufacturing processes have inefficiencies in energy consumption due to design based on peak current, leading to suboptimal facility load factor and energy usage.
Innovation Solution
A heating unit with a control system that dynamically switches between series and parallel connections of multiple heaters based on temperature readings from sensors, allowing for precise temperature control and optimizing energy usage.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Power
If heaters are connected in parallel to provide sufficient heating power, then heating capability is improved, but peak current increases leading to poor facility load factor
Solution Approach 1:
The patent applies dynamics by switching the heater connection configuration from parallel to series based on temperature conditions. The control unit dynamically changes the circuit topology: during initial heating when temperature is below threshold, heaters are connected in parallel to maximize power output; when temperature reaches the threshold, the connection switches to series to reduce current consumption while maintaining adequate heating, thus optimizing facility load factor throughout the heating process.
Solution Approach 2:
The patent changes the electrical connection parameter of the heaters from fixed parallel connection to variable connection (parallel or series) based on temperature parameters. This parameter change allows the system to adapt its electrical characteristics: in parallel connection, total resistance is low providing high current and power for rapid heating; in series connection, total resistance is high reducing current for energy-efficient maintenance heating, thereby improving facility load factor.
2Use of energy by moving object
If heaters are connected in series to reduce peak current, then facility load factor is improved, but heating power becomes insufficient
Solution Approach 1:
The system dynamically selects between series and parallel connections based on real-time temperature feedback. When temperature is below the threshold value, the control unit configures heaters in parallel to deliver maximum heating power. When temperature reaches or exceeds the threshold, the system switches to series connection to reduce power consumption and improve facility load factor, thus providing sufficient heating power only when needed.
Solution Approach 2:
The patent implements periodic switching between parallel and series connections based on temperature threshold achievement. The system alternates between high-power parallel mode during initial heating phase and energy-saving series mode during maintenance phase, creating a periodic action pattern that optimizes both heating effectiveness and facility load factor throughout the heating cycle.
3Stability of the object's composition
If multiple heaters are used to improve temperature distribution, then heating uniformity is improved, but system complexity increases
Solution Approach 1:
The heating system is segmented into multiple independent heater units, each capable of being controlled individually. The control unit can selectively activate specific heaters or groups of heaters based on temperature sensor feedback from different regions. This segmentation allows precise local temperature control to achieve uniform overall temperature distribution while keeping the control logic relatively simple through modular temperature zone management.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach improves the facility load factor, system capacity, and energy consumption efficiency by managing peak currents and maintaining precise temperature control across the heating plate.
Implementation Method 1
a heater (3233) installed in the heating plate (3232)... The first heater (7) and the second heater (8) are resistance heating elements
Data Source
AI summary
Provided is a heating unit including: a heating plate for heating a substrate; a heater installed in the heating plate; and a control unit for controlling the heater, in which wherein the heater includes: a first heater; and a second heater installed at a position different from a position of the first heater, and the control unit includes: a power source for transferring power to at least one of the first heater and the second heater; and a switching module for connecting the first heater and the second heater in series or connecting the first heater and the second heater in parallel.