Heating Vaporization System Flow Control

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Solution Overview

Problem

Conventional heating vaporization systems experience pressure loss when regulating gas flow rates, leading to condensation of source gas and deterioration of gas flowmeters due to elevated temperatures, which compromises measurement accuracy and shortens the lifespan of the flowmeter.

Innovation Solution

The system includes a flow rate detecting part downstream of the flow rate regulating part, with separate heating means for the flow rate regulating part to prevent condensation and maintain the flow rate detecting part within a safe temperature range, ensuring stable gas supply and preventing gas pyrolysis.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of operation

If the gas flow rate regulating valve is opened/closed to regulate the flow rate of the source gas, then the flow rate can be controlled, but pressure loss occurs and the source gas condenses from gas state to liquid state

Engineering Contradiction:
Improveflow rate regulationVSAvoidcondensation of source gas
Core Design Contradiction:
Ease of operationVSObject-affected harmful factors

Solution Approach 1:

The patent applies preliminary action by heating the source gas before it enters the gas flow rate regulating valve. The heating unit raises the temperature of the source gas in advance, preventing condensation that would otherwise occur due to pressure loss across the valve. This proactive temperature adjustment ensures the gas remains in gaseous state throughout the regulation process.

Inventive Principle:
Principle #10Preliminary action

2Object-affected harmful factors

If the temperatures of the source tank, gas lead-out pipe, gas flowmeter, and gas flow rate regulating valve are increased to prevent condensation, then condensation is prevented, but the sensor temperature exceeds the heat resistance temperature range and measurement accuracy is lost

Engineering Contradiction:
Improvecondensation preventionVSAvoidflow rate measurement accuracy
Core Design Contradiction:
Object-affected harmful factorsVSMeasurement precision

Solution Approach 1:

The patent applies local quality by providing heating only to specific components (source tank and gas lead-out pipe) rather than heating the entire gas path including the flowmeter. The heating unit is strategically positioned to warm the gas before it reaches the flowmeter, ensuring the gas remains warm enough to prevent condensation while the flowmeter itself operates within its safe temperature range, preserving measurement accuracy.

Inventive Principle:
Principle #3Local quality

3Object-affected harmful factors

If the temperatures of the gas flowmeter and gas flow rate regulating valve are increased to prevent condensation, then condensation is prevented, but the source gas is pyrolyzed and deteriorated

Engineering Contradiction:
Improvecondensation preventionVSAvoidpyrolysis of source gas
Core Design Contradiction:
Object-affected harmful factorsVSObject-generated harmful factors

Solution Approach 1:

The patent applies parameter changes by carefully controlling the temperature increase within a specific range (50°C to 150°C) using the heating unit. This controlled temperature adjustment is sufficient to prevent condensation but remains below the pyrolysis threshold of the source gas. The parameter control ensures the gas remains stable and undeteriorated while still preventing the harmful condensation effect.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration prevents failures in the gas flowmeter and source gas, while effectively preventing condensation in the gas lead-out pipe, ensuring accurate flow rate measurement and extending the lifespan of the flowmeter.

Implementation Method 1

a heating unit that heats the source gas in the source tank and the gas lead-out pipe

Methodology Applied
Scientific EffectHeating: Heating

Implementation Method 2

a thermal type flow rate sensor provided in the sensor flow path, and measures a flow rate of the source gas flowing through the pipe

Methodology Applied
Scientific EffectThermal type sensing: Thermistor

Data Source

PatentUS10240233B2Heating vaporization system and heating vaporization method
Publication Date: 2019.03.26 HORIBA STEC CO LTD
  • US10240233B2 patent drawing
  • US10240233B2 patent drawing
  • US10240233B2 patent drawing

AI summary

A heating vaporization system provided with: a container that heats and vaporizes a source to produce source gas; a pipe for leading out the source gas; a sensor flow path that is provided in the pipe; a flow rate detecting part that is provided with a thermal type flow rate sensor provided in the sensor flow path, and measures a flow rate of the source gas flowing through the pipe; a flow rate regulating part that regulates the flow rate of the source gas flowing through the pipe located upstream of the flow rate detecting part; and a control part that uses a result of the detection by the flow rate detecting part to control the flow rate regulating part.