Height Adjustment Member for Charged Particle Beam Diaphragm Alignment
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Solution Overview
Problem
Existing charged particle beam devices face challenges in obtaining clear images when observing samples at atmospheric pressure due to electron beam scattering by diaphragms and gas molecules, and there is a lack of methods to accurately adjust the distance between the diaphragm and the sample to minimize scattering while preventing diaphragm damage.
Innovation Solution
A method involving a height adjustment member and a Z-axis driving mechanism to precisely adjust the distance between the diaphragm and the sample, using an optical device to determine the positional relationship and ensure the diaphragm and sample are correctly aligned, allowing for clear image acquisition.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If the distance between the diaphragm and the sample is reduced to minimize electron beam scattering, then the image clarity is improved, but the risk of diaphragm damage increases
Solution Approach 1:
The patent applies preliminary action by measuring and recording the height of the sample placement section before actual observation. The height adjustment member is positioned to contact the diaphragm, and this height information is stored in advance. When observing samples, the sample placement section is moved to the predetermined height, ensuring the distance between the diaphragm and sample is optimized without risking contact or damage to the diaphragm.
2Measurement precision
If a camera is used to monitor the distance between the sample and the diaphragm, then the distance control is improved, but the method becomes ineffective when the distance decreases to several hundred micrometers or less
Solution Approach 1:
The patent replaces the optical measurement system (camera) with a mechanical measurement system. A height adjustment member with a measurable height is used to physically establish the distance between the sample placement section and the diaphragm. This mechanical approach allows for accurate distance control even when the gap is reduced to several hundred micrometers or less, where optical methods become ineffective.
3Adaptability or versatility
If the sample stage is moved every time the sample is replaced to adjust the distance, then the observation flexibility is improved, but the distance consistency deteriorates
Solution Approach 1:
The patent applies preliminary action by pre-determining and storing the optimal height position of the sample placement section before sample replacement. Each time a sample is replaced, the system retrieves the stored height information and automatically positions the sample placement section to the correct height, ensuring consistent distance between the diaphragm and sample while maintaining the flexibility to observe different samples.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach allows for safe reduction of the diaphragm-sample distance, reducing the risk of diaphragm damage, enabling clear image acquisition and reducing the frequency of diaphragm replacement, thus lowering operational costs and improving observation convenience.
Implementation Method 1
a height adjustment member 403, and the position of a diaphragm 10 in a charged particle beam device with respect to the height adjustment member 403 is defined as a specific point of an optical device 402
Implementation Method 2
the position of a diaphragm 10 in a charged particle beam device with respect to the height adjustment member 403 is defined as a specific point of an optical device 402
Implementation Method 3
an SEM device capable of placing a sample in an atmospheric pressure, in a desired gas pressure, or in a desired gas species by providing a diaphragm or a micropore which can allow an electron beam to penetrate therethrough
Implementation Method 4
when a distance between the diaphragm and the sample is long, due to the gas molecule in the atmosphere, the charged particle beam is scattered, resulting in an unclear microscope image
Data Source
AI summary
In a device for performing observation with a charged particle microscope at an atmospheric pressure using a diaphragm, while there was a demand that a distance between the diaphragm and a sample be reduced as much as possible, there was a problem that a limit for how close the diaphragm and the sample can be brought to each other was unknown in the past. In the present invention, a height adjustment member is used, and the position of a diaphragm in a charged particle beam device with respect to the height adjustment member is defined as the specific point of an optical device, so that the positional relationship between the height adjustment member and the diaphragm in the optical device is reproduced, and the height of a sample table with a Z-axis driving mechanism is adjusted so as to locate the surface of the sample at the position of the specific point of the optical device. According to this, the distance between the diaphragm and the sample can be safely and simply adjusted, and thus, an object is to adjust the distance between the diaphragm and the sample so that the distance is reduced as much as possible or the distance is fixed every time the sample is replaced.