Height Image Alignment for Vibration-Corrected Shape Inspection
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Solution Overview
Problem
Existing optical displacement meters struggle to generate accurate height images of moving measurement objects due to vibration components in both the height and lateral directions, leading to inaccurate shape representation.
Innovation Solution
A shape inspection device that uses a light projecting unit and receiving unit to generate profile data, which is then corrected using correction reference regions and characteristic points to offset profile data in the X and Z directions, reducing vibration components and generating an accurate height image.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If vibration component estimation is performed based on periodicity of displacement in the height direction, then the vibration component in the height direction can be estimated, but it is difficult to estimate the vibration component in the lateral direction and there is a possibility of erroneous estimation
Solution Approach 1:
The invention transitions from one-dimensional vibration correction (height direction only) to two-dimensional vibration correction by adding lateral direction correction. The correction reference region is defined in both height and lateral directions, and characteristic points are extracted and corrected in both dimensions, enabling comprehensive vibration component removal in multiple directions simultaneously.
Solution Approach 2:
The invention introduces a correction reference region as an intermediary element that serves as a basis for vibration correction. This reference region contains characteristic points that are used to calculate correction amounts, which are then applied to correct the height image data, effectively mediating between the raw measurement data and the corrected output.
2Measurement precision
If profile data is corrected using correction reference regions and characteristic points, then vibration components are reduced and accurate height images are generated, but the processing complexity increases
Solution Approach 1:
The invention segments the height image into multiple pieces of profile data, each corresponding to a different position in the movement direction. By processing each profile data piece independently through the correction流程 (extracting characteristic points, calculating correction amounts, applying corrections), the system achieves accurate vibration correction while maintaining manageable processing complexity through modular operation.
Solution Approach 2:
The invention performs preliminary extraction of characteristic points from the correction reference region before applying vibration correction to the entire height image. By identifying and correcting the positions of these characteristic points first, the system establishes a foundation for accurate correction of all profile data, reducing overall processing complexity through systematic preprocessing.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The device effectively corrects for vibration components in profile data, enabling the generation of a height image that accurately reflects the shape of the measurement object, even when vibrations occur in both directions.
Implementation Method 1
a light projecting unit that irradiates a measurement object relatively moving in a direction of a Y axis, which intersects with an X axis, with slit light spreading in a direction of the X axis or spot light scanning in the X-axis direction; a light receiving unit that receives reflected light from each position in the X-axis direction
Implementation Method 2
The present invention relates to a technique of detecting a displacement of a measurement object by a triangulation method
Data Source
AI summary
Provided are a shape inspection device, a processing device, a height image processing method, and a height image processing program capable of accurately inspecting a measurement object. A profile data generation unit sequentially generates a plurality of pieces of profile data as the measurement object relatively moves in a Y-axis direction. A height image generation unit extracts characteristic points for the respective pieces of profile data, and moves the respective pieces of profile data in a plane intersecting with a Y axis such that the extracted characteristic points are aligned in a line in a direction corresponding to the Y axis. Then, the height image generation unit arranges the moved profile data in a direction corresponding to the Y axis to correct a height image.