Helical Heating Resistor Thermal Expansion Management

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Solution Overview

Problem

Conventional heat-processing furnaces face durability issues due to the accumulation of creep strain and thermal expansion in helical heating resistors, leading to potential short circuits and reduced lifespan, especially in vertical furnaces where thermal expansion causes the heating line to deform and break.

Innovation Solution

The implementation of a heat-processing furnace design featuring a helical heating resistor supported by axial support members with terminal and fixing plates that are attached using a shared attachment structure, allowing for thermal expansion and contraction while embedding fixing plates within the heat insulating member to prevent stress concentration and joint overheating.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Temperature

If a helical heating resistor is used in a vertical heat-processing furnace, then the furnace can heat the processing vessel at high temperature, but the heating resistor accumulates creep strain and thermal expansion leading to deformation and potential short circuits

Engineering Contradiction:
Improveheating temperatureVSAvoiddurability of heating resistor
Core Design Contradiction:
TemperatureVSReliability

Solution Approach 1:

The heating resistor is divided into multiple sections with support members positioned at regular intervals along its length. This segmentation provides multiple anchoring points that prevent cumulative thermal expansion and creep deformation, maintaining the resistor's geometric integrity at high temperatures while improving reliability

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Support members are pre-installed at predetermined positions along the heating resistor before operation. These support members proactively counteract thermal expansion and creep strain before they can cause deformation or short circuits, preventing reliability issues rather than addressing them after they occur

Inventive Principle:
Principle #10Preliminary action

2Stress or pressure

If the heating resistor is allowed to thermally expand and contract freely, then thermal stress is reduced, but the resistor may deform or break due to accumulated elongation

Engineering Contradiction:
Improvethermal stressVSAvoidgeometric integrity of heating resistor
Core Design Contradiction:
Stress or pressureVSShape

Solution Approach 1:

The heating resistor is segmented into multiple sections by support members that provide intermediate anchoring points. This segmentation allows each section to expand and contract independently with reduced thermal stress, while the overall geometric integrity is maintained by preventing cumulative elongation across the entire resistor length

Inventive Principle:
Principle #1Segmentation

3Reliability

If a rod-like fixing member is used to prevent elongation accumulation, then durability is improved, but the fixing member is easily escaped from the heat insulating member resulting in inferior sustainability

Engineering Contradiction:
Improvedurability of heating resistorVSAvoidsustainability of fixing member
Core Design Contradiction:
ReliabilityVSDuration of action of stationary object

Solution Approach 1:

The support members are formed with a curved or bent configuration rather than straight rod-like shapes. This curvature allows the support members to flex with thermal expansion and contraction while maintaining their anchoring function, preventing both elongation accumulation and escape from the heat insulating member, thereby improving both durability and sustainability

Inventive Principle:
Principle #14Spheroidality (Curvature)

4Reliability

If the heating resistor is supported at multiple points, then thermal expansion is accommodated, but the structure becomes more complex

Engineering Contradiction:
Improvedurability of heating resistorVSAvoidstructural complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The heating resistor structure is segmented into standardized sections with support members at regular intervals. This systematic segmentation accommodates thermal expansion through multiple support points while maintaining manufacturing simplicity and structural regularity, balancing reliability improvement with acceptable structural complexity

Inventive Principle:
Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This design enhances the durability of the heating resistor by preventing elongation accumulation and reducing the risk of short circuits, maintaining the fixing performance and extending the lifespan of the furnace by distributing stress and maintaining low joint temperatures.

Implementation Method 1

a heating resistor disposed along an inner circumferential surface of the heat insulating member

Methodology Applied
Scientific EffectResistive heating: Joule Heating

Implementation Method 2

a heat quantity taken away as a radiant heat and a conductive heat can be reduced

Methodology Applied
Scientific EffectRadiant heat: Thermal Radiation

Implementation Method 3

a heat quantity taken away as a radiant heat and a conductive heat can be reduced

Methodology Applied
Scientific EffectConductive heat: Conduction (thermal)

Implementation Method 4

the heater line thermally expands upon heating

Methodology Applied
Scientific EffectThermal expansion: Thermal Expansion

Implementation Method 5

the heater line thermally expands upon heating

Methodology Applied
Scientific EffectThermal shrinkage: Thermal Contraction

Implementation Method 6

use of the heating line under a high temperature invites a creep strain, so that a length of the heating line is gradually increased

Methodology Applied
Scientific EffectCreep: Creep

Data Source

PatentUS7888622B2Heat-processing furnace and manufacturing method thereof
Publication Date: 2011.02.15 TOKYO ELECTRON LTD
  • US7888622B2 patent drawing
  • US7888622B2 patent drawing
  • US7888622B2 patent drawing

AI summary

A heat-processing furnace comprises: a processing vessel for housing an object to be processed to thermally heat the object to be processed; a cylindrical heat insulating member surrounding the processing vessel; a helical heating resistor disposed along an inner circumferential surface of the heat insulating member; and support members axially disposed on the inner circumferential surface of the heat insulating member, for supporting the heating resistor at predetermined pitches. A plurality of terminal plates are disposed outside the heating resistor at suitable intervals therebetween and attached to the heating resistor, the terminal plates radially passing through the heat insulating member to be extended outside. A plurality of fixing plates are disposed outside the heating resistor at suitable intervals therebetween and attached to the heating resistor, the fixing plates being fixed in the heat insulating member. The fixing plates are attached to the heating resistor by the same attachment structure as the attachment structure of the terminal plates to the heating resistor.