Helical Heating Resistor Support for Thermal Furnace Creep

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Solution Overview

Problem

In thermal processing furnaces, the helical heating elements experience creep strain and thermal expansion, leading to deformation and potential short-circuits due to repeated temperature changes, which compromises their durability and functionality.

Innovation Solution

A thermal processing furnace design featuring support members on the inner surface of the heat insulation member to allow thermal expansion and shrinkage, combined with movement prevention members that prevent downward movement of the heating resistor, ensuring radial movement is possible while maintaining structural integrity.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If the heating element is supported with clearance to allow thermal expansion and shrinkage, then the heating element can accommodate temperature changes, but the heating element undergoes creep strain and slowly increases in length over time, leading to deformation and potential short-circuits

Engineering Contradiction:
Improvethermal expansion accommodationVSAvoidheating element durability
Core Design Contradiction:
Adaptability or versatilityVSReliability

Solution Approach 1:

The heating element support structure is segmented into multiple support points along the helical heating element. Each support member independently holds a section of the heating element, allowing localized thermal expansion while preventing cumulative deformation. The support members are positioned at intervals to provide distributed support rather than a single fixed point.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Support members made of heat-resistant material serve as intermediaries between the heating element and the furnace structure. These support members accommodate thermal expansion and creep strain of the heating element while transferring minimal stress to the heating element itself, preventing deformation and short-circuits.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Stability of the object's composition

If the heating element is fixed rigidly to prevent movement, then structural stability is improved, but the heating element cannot thermally expand and shrink, causing stress concentration and deterioration

Engineering Contradiction:
Improvestructural stabilityVSAvoidheating element lifetime
Core Design Contradiction:
Stability of the object's compositionVSReliability

Solution Approach 1:

The support structure is designed to be dynamically adaptable rather than rigidly fixed. The support members allow the heating element to move radially during thermal expansion and shrinkage while preventing axial displacement. This dynamic support system maintains structural stability while accommodating thermal cycles.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

Different portions of the heating element have different support characteristics. The support members provide localized support at specific positions along the helical element, allowing thermal expansion in radial directions while constraining axial movement. This creates zones of flexibility and stability along the heating element length.

Inventive Principle:
Principle #3Local quality

3Adaptability or versatility

If support members are used to hold the heating element, then thermal expansion is accommodated, but the heating element moves downward due to gravitation and creep accumulation, increasing winding diameter at the lowermost turn

Engineering Contradiction:
Improvethermal expansion capabilityVSAvoidheating element geometry
Core Design Contradiction:
Adaptability or versatilityVSShape

Solution Approach 1:

The support members are positioned and configured to counteract the gravitational force acting on the heating element. By providing upward support forces at multiple points along the helical element, the support members prevent downward displacement and accumulation of creep strain that would otherwise increase the winding diameter at the lowermost turn.

Inventive Principle:
Principle #8Anti-weight (Counterweight)

Solution Approach 2:

The support members are pre-positioned along the heating element before thermal cycling begins. This preliminary support structure prevents the heating element from developing deformation patterns during thermal expansion, maintaining the original geometric configuration and preventing winding diameter increase.

Inventive Principle:
Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This design prevents deformation and short-circuits, enhancing the durability of the heating resistor by allowing radial movement while preventing downward displacement, thus extending the lifespan of the thermal processing furnace.

Implementation Method 1

the heating element is thermally expanded during a heating operation

Methodology Applied
Scientific EffectThermal expansion: Thermal Expansion

Implementation Method 2

the heating element can be thermally expanded and thermally shrunk

Methodology Applied
Scientific EffectThermal shrinkage: Thermal Contraction

Implementation Method 3

the heating element undergoes a creep strain, and slowly increases in length over time

Methodology Applied
Scientific EffectCreep: Creep

Implementation Method 4

assist effective heating by decreasing a heat quantity which is lost as radiant heat and conductive heat

Methodology Applied
Scientific EffectRadiant heat: Thermal Radiation

Implementation Method 5

assist effective heating by decreasing a heat quantity which is lost as radiant heat and conductive heat

Methodology Applied
Scientific EffectConductive heat: Conduction (thermal)

Data Source

PatentUS8476560B2Thermal processing furnace
Publication Date: 2013.07.02 TOKYO ELECTRON LTD
  • US8476560B2 patent drawing
  • US8476560B2 patent drawing
  • US8476560B2 patent drawing

AI summary

A thermal processing furnace comprises: a tubular heat insulation member 4 surrounding a processing vessel 3 for receiving and thermally processing an object to be processed w; a heating resistor 5 helically arranged on an inner circumferential surface of the heat insulation member 4; and a support member 13 disposed on the inner circumferential surface of the heat insulation member 4, the support member 13 supporting the heating resistor 5 such that the heating resistor 5 can be thermally expanded and thermally shrunk. The thermal processing furnace further comprises: a movement prevention member 15 disposed on the heating resistor 5 to be in contact with one side surface of the support member 13 so as to prevent a downward movement of the heating resistor 5.