Helical Plug for Arcing Prevention in Electrostatic Chucks

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Solution Overview

Problem

Electrostatic chucks in plasma processing chambers experience gas breakdown and arcing due to high electric field generation in the gas passages, particularly in regions with high power RF fields, which affects heat transfer uniformity and efficiency.

Innovation Solution

The electrostatic chuck design includes a polymer sleeve with a core having a central protrusion and peripheral ledge, featuring a helical channel that defines a gas flow path, along with a porous plug in the gas flow path, to minimize arcing and enhance heat transfer by controlling gas flow.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Temperature

If gas passages are provided in the electrostatic chuck to enhance heat transfer uniformity, then heat transfer uniformity is improved, but gas breakdown and arcing occur due to high electric field generation

Engineering Contradiction:

Improveheat transfer uniformityVSAvoidarcing

Core Design Contradiction:

TemperatureVSObject-affected harmful factors

Solution Approach 1:

A dielectric material is introduced as an intermediary substance filling the gas passages and cavities within the electrostatic chuck. This dielectric material mediates between the electric field and the gas, preventing gas breakdown and arcing while allowing heat transfer to continue through the passages, thus resolving the contradiction between heat transfer uniformity and arcing prevention

Inventive Principle:

Principle #24Intermediary (Mediator)

Solution Approach 2:

The electrical properties of the medium within the gas passages are changed by introducing a dielectric material, which alters the electric field distribution and prevents gas breakdown. This parameter change allows the system to maintain both good heat transfer uniformity and prevent arcing simultaneously

Inventive Principle:

Principle #35Parameter changes

2Productivity

If high power radio frequency fields are applied for substrate processing, then processing efficiency is improved, but gas breakdown and arcing occur in the gas passages

Engineering Contradiction:

Improveprocessing efficiencyVSAvoidgas breakdown

Core Design Contradiction:

ProductivityVSObject-affected harmful factors

Solution Approach 1:

The dielectric material serves as a protective intermediary that allows high power RF fields to be applied for efficient substrate processing while preventing gas breakdown in the passages. The dielectric withstands the high electric fields without causing gas ionization, enabling high productivity without the harmful effect of gas breakdown

Inventive Principle:

Principle #24Intermediary (Mediator)

3Device complexity

If simple hole structures are used for gas flow, then device complexity is reduced, but arcing occurs in high RF field regions

Engineering Contradiction:

Improvestructure simplicityVSAvoidarcing

Core Design Contradiction:

Device complexityVSObject-affected harmful factors

Solution Approach 1:

Rather than complicating the hole structure, the invention simply introduces a dielectric material as an intermediary into the existing simple hole structure. This maintains structural simplicity while the dielectric prevents arcing in high RF field regions, resolving the contradiction between simplicity and arcing prevention

Inventive Principle:

Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The design effectively reduces arcing and improves heat transfer uniformity by creating a controlled gas flow path, maintaining efficient substrate processing in high RF environments.

Implementation Method 1

a helical channel extending from a lower surface of the core towards the peripheral ledge to at least partially define a gas flow path through the plug

Methodology Applied

Scientific EffectGas flow:

Implementation Method 2

a polymer sleeve having a central opening; and a core disposed in the central opening of the polymer sleeve

Methodology Applied

Scientific EffectElectrical insulation: Dielectric

Implementation Method 3

A type of electrostatic chuck includes holes to flow heat transfer fluid such as a gas between a support surface of the electrostatic chuck and a backside of the substrate to enhance the uniformity and rate of heat transfer

Methodology Applied

Scientific EffectThermal conduction: Conduction (thermal)

Data Source

PatentUS11551960B2Helical plug for reduction or prevention of arcing in a substrate support

Publication Date: 2023.01.10 APPLIED MATERIALS INC

AI summary

Embodiments of a plug for use in an electrostatic chuck are provided herein. In some embodiments, a plug for use in an electrostatic chuck includes a polymer sleeve having a central opening; and a core disposed in the central opening of the polymer sleeve, the core having a central protrusion and a peripheral ledge, wherein an outer surface of the core includes a helical channel extending from a lower surface of the core towards the peripheral ledge to at least partially define a gas flow path through the plug, and wherein the peripheral ledge is disposed between an upper surface of the polymer sleeve and the lower surface of the core.