HEMT Metamaterial Terahertz Phase Modulator

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Solution Overview

Problem

Current terahertz dynamic functional devices lack the ability to quickly and dynamically control the phase of spatially transmitted terahertz waves within a large bandwidth, which is essential for efficient terahertz communication systems.

Innovation Solution

A metamaterial structure combined with High Electron Mobility Transistor (HEMT) technology, featuring a semiconductor substrate, epitaxial layer, and a modulation unit array with specific resonator designs, allows for rapid phase modulation of terahertz waves by controlling the resonation modes using external voltage signals, achieving a phase modulation depth of up to 90 degrees within a large bandwidth.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Speed

If conventional terahertz dynamic functional devices are used, then device operation is possible, but the ability to quickly and dynamically control the phase of spatially transmitted terahertz waves within a large bandwidth is insufficient

Engineering Contradiction:
Improvephase modulation speedVSAvoidbandwidth
Core Design Contradiction:
SpeedVSAdaptability or versatility

Solution Approach 1:

The patent changes the electrical parameters (carrier concentration, electron density) of the 2-DEG in the HEMT by applying external voltage to the gate. This dynamically alters the plasma frequency and resonant characteristics of the metamaterial structure, enabling rapid phase modulation across a large bandwidth. The variable electrical parameters allow the device to adapt to different frequency ranges and modulation depths.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent combines HEMT (a high-performance semiconductor device with 2-DEG) with metamaterial structures (artificial electromagnetic resonant units) to create a composite functional device. The HEMT provides high-speed electrical control capability while the metamaterial provides strong terahertz wave interaction and phase modulation capability. This composite structure achieves both fast response and large bandwidth phase modulation.

Inventive Principle:
Principle #40Composite materials

2Adaptability or versatility

If HEMT and metamaterial structure are combined for rapid phase modulation, then phase modulation depth and bandwidth are improved, but device structure complexity increases

Engineering Contradiction:
Improvephase modulation depth and bandwidthVSAvoidstructure complexity
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The patent divides the modulator into multiple independent modulation units arranged in an array. Each unit contains a HEMT and associated metamaterial resonant structures (split-ring resonators or similar elements). This segmentation allows the complex function to be distributed across multiple simpler, identical modules, making the overall system more manageable and manufacturable despite the advanced functionality.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent designs the modulation units with universal, standardized structures that can be replicated across the array. Each unit performs the same phase modulation function, and the entire array works together to achieve the desired overall phase control. This universality simplifies fabrication and design while achieving high performance through the collective action of multiple identical elements.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution enables high-speed and effective phase modulation of terahertz waves, enhancing the modulation bandwidth and depth, facilitating efficient terahertz communication while being easy to manufacture and operate at room temperature and normal pressure without the need for waveguide loading.

Implementation Method 1

High electron mobility transistor (HEMT) have shown excellent performance... HEMT is a novel field effect transistor which applies 2-dimensional electrons gas (2-DEG) in modulation doped heterostructures to work. In 1978, R. Dingle firstly observed high electron mobility.

Methodology Applied
Scientific EffectHigh electron mobility:

Implementation Method 2

Metamaterial is a kind of artificial electromagnetic array structure, which is made from assemblies of specific geometry resonance units with periodic or aperiodic patterns... resonation mode switch of the metamaterial is rapidly controlled

Methodology Applied
Scientific EffectResonance: Resonance

Data Source

PatentUS9865692B2Spatial terahertz wave phase modulator based on high electron mobility transistor
Publication Date: 2018.01.09 UNIV OF ELECTRONICS SCI & TECH OF CHINA
  • US9865692B2 patent drawing
  • US9865692B2 patent drawing
  • US9865692B2 patent drawing

AI summary

A spatial terahertz wave phase modulator based on the high electron mobility transistor is provided. The phase modulator combines the quick-response high electron mobility transistor with a novel metamaterial resonant structure, so as to rapidly modulate terahertz wave phases in a free space. The phase modulator includes a semiconductor substrate, an HEMT epitaxial layer, a periodical metamaterial resonant structure and a muff-coupling circuit. A concentration of 2-dimensional electron gas in the HEMT epitaxial layer is controlled through loading voltage signals, so as to change an electromagnetic resonation mode of the metamaterial resonant structure, thereby achieving phase modulation of terahertz waves. The phase modulator has a phase modulation depth of over 90 degrees within a large bandwidth, and a maximum phase modulation depth is about 140 degrees. Furthermore, the phase modulator is simple in structure, easy to machine, high in modulation speed, convenient to use, and easy to package.