3D HEMT Power Amplifier With Single-Crystal SAW Filtering

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Solution Overview

Problem

Current 3D integrated circuit (3D IC) technology is inadequate for delivering the power-performance-area-cost (PPAC) specifications required for next-generation high-performance, low-power mobile user equipment devices, particularly in meeting the transmission frequency demands of 5G and 6G wireless communications.

Innovation Solution

A monolithic 3D IC chip is developed, integrating a compound semiconductor high electron mobility transistor (HEMT) active device with an acoustic device in a single crystal layer and a passive device in back-end-of-line layers, utilizing a heterogeneous wideband compound semiconductor FET power amplifier with narrow band acoustic filters and broadband integrated passive device filters.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If multiple separate components (PA, SAW filter, LNA, switches) are integrated into a single chip, then device functionality and performance are improved, but manufacturing complexity and cost increase

Engineering Contradiction:
Improvedevice functionalityVSAvoidmanufacturing complexity
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The patent integrates the power amplifier, SAW filter, low-noise amplifier, and switches into a single heterogeneous integrated circuit chip, combining multiple discrete components into one unified device to improve functionality while managing manufacturing complexity through specialized integration techniques

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The integrated circuit chip performs multiple functions including power amplification, signal filtering, low-noise amplification, and switching operations, allowing a single component to replace multiple separate devices and thereby improving overall device versatility

Inventive Principle:
Principle #6Universality (Multi-functionality)

2Ease of manufacture

If conventional separate components are used, then manufacturing is simpler, but device size and component count increase

Engineering Contradiction:
Improvemanufacturing simplicityVSAvoiddevice size
Core Design Contradiction:
Ease of manufactureVSVolume of moving object

Solution Approach 1:

Multiple separate components are merged into a single integrated circuit chip, significantly reducing the overall device volume and component count while maintaining manufacturing feasibility through standardized heterogeneity integration processes

Inventive Principle:
Principle #5Merging (Combining)

3Adaptability or versatility

If wideband operation is implemented, then communication versatility is improved, but signal interference and filtering complexity increase

Engineering Contradiction:
Improvecommunication versatilityVSAvoidfiltering complexity
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

A surface acoustic wave (SAW) filter is integrated into the circuit to serve as an intermediary component that selectively filters out interfering signals while allowing desired wideband communication signals to pass through, thereby managing filtering complexity in a wideband system

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution achieves high efficiency, power density, and wideband impedance matching, meeting the bandwidth and frequency requirements of 5G/6G communication specifications while reducing component size and manufacturing costs.

Implementation Method 1

integrate a single-crystal surface acoustic wave (SAW) resonator or filter

Methodology Applied
Scientific EffectSurface acoustic wave: Surface Acoustic Wave

Data Source

PatentEP4140033B1Heterogeneous integrated wideband high electron mobility transistor power amplifier with a single-crystal acoustic resonator/filter
Publication Date: 2026.05.06 QUALCOMM INC
  • EP4140033B1 patent drawingFigure 1
  • EP4140033B1 patent drawingFigure 2A~2B
  • EP4140033B1 patent drawingFigure 3

AI summary

A 3D integrated circuit (3D IC) chip (400) is described. The 3D IC chip includes a die (440) having a compound semiconductor high electron mobility transistor (HEMT) active device (410). The compound semiconductor HEMT active device is composed of compound semiconductor layers (420) on a single crystal, compound semiconductor layer (442). The 3D IC chip also includes an acoustic device (430) integrated in the single crystal, compound semiconductor layer (442). The 3D IC chip further includes a passive device (460) integrated in back-end-of-line layers (450) of the die on the single crystal, compound semiconductor layer.