HEMT With Varying Cap Layer Thickness For Linearity

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Solution Overview

Problem

High electron mobility transistors face challenges in achieving high linearity due to rapid increases in transconductance with respect to gate voltage, which is difficult to control, and reducing gate width to improve linearity also reduces carrier density, making it undesirable.

Innovation Solution

A high electron mobility transistor (HEMT) with a cap layer and channel layer forming a heterojunction, featuring a staircase profile under the gate electrode, varying in thickness along the width, allowing for multiple virtual channels with different threshold voltages, enhancing linearity through controlled transconductance and carrier density.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If the gate width is reduced to improve linearity, then linearity is improved, but carrier density is reduced

Engineering Contradiction:
ImprovelinearityVSAvoidcarrier density
Core Design Contradiction:
ReliabilityVSQuantity of substance

Solution Approach 1:

The cap layer is designed with non-uniform thickness along the width of the transistor channel, creating different local properties in different regions. This allows the transistor to achieve improved linearity through controlled transconductance variation while maintaining adequate carrier density through the wider gate structure, thus resolving the contradiction between linearity improvement and carrier density preservation

Inventive Principle:
Principle #3Local quality

2Speed

If the transconductance increases rapidly with gate voltage to improve switching performance, then switching performance is improved, but linearity deteriorates

Engineering Contradiction:
Improveswitching performanceVSAvoidlinearity
Core Design Contradiction:
SpeedVSReliability

Solution Approach 1:

The varying thickness of the cap layer creates a dynamic transconductance characteristic that can be optimized to balance switching performance and linearity. The structural variation allows for controlled modulation of carrier density and transconductance, enabling the transistor to achieve both rapid switching response and improved linearity by managing the rate of transconductance increase with gate voltage

Inventive Principle:
Principle #15Dynamics

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The varying cap layer thickness improves linearity by achieving a gradual increase in transconductance, reducing the magnitude of gm3, thereby enhancing the operational range and power density of the transistor.

Implementation Method 1

a cap layer and a channel layer forming a heterojunction, such that a two dimensional electron gas is formed at the interface of cap layer and the channel layer

Methodology Applied
Scientific EffectHeterojunction:

Implementation Method 2

a two dimensional electron gas is formed at the interface of cap layer and the channel layer

Methodology Applied
Scientific EffectTwo-dimensional electron gas formation:

Data Source

PatentEP3491671B1High electron mobility transistor with semiconductor layer having a thickness varying along the transistor width
Publication Date: 2020.08.19 MITSUBISHI ELECTRIC CORP
  • EP3491671B1 patent drawingFigure 1A
  • EP3491671B1 patent drawingFigure 1B
  • EP3491671B1 patent drawingFigure 1C

AI summary

A high electron mobility transistor (HEMT) includes a semiconductor structure including a cap layer (101) and a channel layer (102) forming a heterojunction, such that a two dimensional electron gas is formed at the interface of cap layer and the channel layer. The HEMT also includes a set of electrodes including a source electrode (110), a drain electrode (120), and a gate electrode (130) deposited on the cap layer. The gate electrode is arranged between the source and the drain electrode along the length of the HEMT. The thickness of the cap layer at least under the gate electrode is varying along the width of the HEMT.