Hermetic Flow Sensor Packaging for Corrosive Vacuum Environments
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Solution Overview
Problem
Conventional sensors used in manufacturing systems, particularly in semiconductor applications, are not compatible with aggressive environments such as corrosive conditions, high-energy plasma, and vacuum settings, leading to issues with durability, reliability, and precise gas flow control.
Innovation Solution
A sensor assembly featuring a multi-layered ceramic substrate with electrical contact pads and a housing that forms a hermetic seal, incorporating a sensor device directly in the gas flow path, protected by a conformal coating to maintain accuracy and durability in harsh environments.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If conventional sensors are used in aggressive manufacturing environments, then manufacturing systems can perform gas flow measurements, but the sensors are not compatible with corrosive conditions, high-energy plasma, and vacuum settings, leading to poor durability and reliability
Solution Approach 1:
A hermetically sealed housing acts as an intermediary barrier between the sensor device and the aggressive process environment. The housing contains the sensor while isolating it from corrosive gases, plasma, and vacuum conditions, allowing the sensor to function reliably without direct exposure to harmful factors.
Solution Approach 2:
The sensor assembly employs composite construction combining a hermetic housing material (resistant to aggressive environments) with a sensor device (for measurement). This composite structure allows the system to simultaneously achieve environmental resistance and measurement functionality.
2Measurement precision
If sensors are placed directly in the gas flow path for accurate measurement, then gas flow properties can be precisely monitored, but the sensor geometry may adversely affect the process gas properties and create turbulence
Solution Approach 1:
The sensor device is positioned to measure gas flow properties at a specific location within the housing without requiring the entire sensor assembly to be in the main flow path. This localized measurement approach enables accurate readings while minimizing disruption to the overall gas flow characteristics.
Solution Approach 2:
The hermetic housing serves as an intermediary that allows the sensor to indirectly monitor gas flow properties through controlled interaction points, rather than requiring direct immersion of the entire sensor in the flow path. This reduces turbulence while maintaining measurement capability.
3Reliability
If special geometry is designed for sensors to be compatible with aggressive environments, then durability and reliability improve, but device complexity increases
Solution Approach 1:
The sensor system is segmented into distinct functional components: a hermetic housing for environmental protection and a sensor device for measurement. This segmentation allows each component to be optimized independently - the housing for durability and the sensor for measurement accuracy - simplifying the overall design while maintaining reliability.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution provides a robust, reliable, and accurate means to monitor and control gas flow rates and temperatures in aggressive manufacturing environments, minimizing turbulence and corrosion effects while maintaining vacuum integrity.
Implementation Method 1
a sensor device directly in the gas flow path, protected by a conformal coating to maintain accuracy and durability in harsh environments
Implementation Method 2
a housing that forms a hermetic seal
Data Source
AI summary
A sensor assembly includes a substrate including an outer region, an inner region, and a middle region positioned between the outer region and the inner region, the substrate further including electrical contact pads on at least the inner region. The sensor assembly further includes a housing coupled to the substrate at the outer region to provide a hermetic seal. The sensor assembly further includes a sensor device coupled to the substrate, via the electrical contact pads, at the inner region.