Hermetic Microelectronics Leak Testing via Vacuum Evacuation
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Solution Overview
Problem
Current leak testing methods for hermetically sealed electronic components, such as those using tracer gases like Helium or Krypton-85, are not 100% effective, especially for 'one-way leakers' where gases can enter but not escape, leading to inaccurate results due to excessive inward forces.
Innovation Solution
A method and apparatus utilizing a vacuum system with a mass spectrometer and load-lock system to evacuate the interior of hermetically sealed components, analyzing the chemical composition of the evacuated atmosphere to directly measure leak rates without the need for tracer gases, and incorporating machine-learning analysis of X-ray imaging for improved screening.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If tracer gas methods (Helium or Krypton-85) are used for leak testing, then the testing process can be simplified, but measurement accuracy deteriorates for one-way leakers due to excessive inward forces preventing gas off-gassing
Solution Approach 1:
Instead of introducing tracer gas into the hermetically sealed package and measuring off-gassing (conventional approach), the invention evacuates the package interior and measures the evacuation curve to determine leak rate. This inversion of the testing approach eliminates the one-way leaker problem by removing the inward force that prevents gas escape, allowing accurate measurement of all leak types.
Solution Approach 2:
The invention changes the pressure parameter from positive pressure (tracer gas introduction) to negative pressure (evacuation). By evacuating the package interior to create a vacuum, the testing method eliminates the inward forces that cause one-way leaking, enabling accurate measurement of leak rates for all types of hermetically sealed packages.
2Reliability
If tracer gases like Helium or Krypton-85 are used, then leak testing can be performed, but cost increases due to expensive and scarce tracer gases
Solution Approach 1:
The invention replaces expensive, scarce tracer gases (Helium, Krypton-85) with a reusable vacuum system that uses standard atmospheric air for evacuation. The vacuum system can be repeatedly used without consuming valuable tracer gases, significantly reducing testing costs while maintaining reliability.
Solution Approach 2:
The invention extracts and eliminates the need for tracer gases from the testing process. By using vacuum evacuation of atmospheric air instead of introducing tracer gases, the method removes the costly substance requirement while preserving the ability to detect and measure leak rates accurately.
3Ease of manufacture
If conventional leak testing methods are used, then testing can be performed with existing equipment, but measurement accuracy deteriorates due to inability to detect one-way leakers
Solution Approach 1:
The invention inverts the conventional testing approach by evacuating the package interior rather than introducing tracer gas. This reversal eliminates the one-way leaker detection problem by removing the inward force barrier, enabling accurate measurement of all leak types with standard vacuum equipment.
Solution Approach 2:
The invention replaces the mechanical tracer gas introduction system with a vacuum evacuation system. By using vacuum technology instead of gas pressurization, the method achieves more accurate leak detection for all package types while utilizing readily available testing equipment.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach provides a non-destructive, accurate measurement of individual package leak rates, eliminating the need for expensive and scarce tracer gases, and is applicable to small volumes, enhancing the testing of hermetic microelectronics by distinguishing between good and leaking components.
Implementation Method 1
use of a vacuum system containing a mass spectrometer for chemical analysis
Implementation Method 2
evacuating the microelectronic device, along with monitoring the emerging chemical components from the device
Data Source
AI summary
Provided are methods and associated apparatus for determining the integrity of a hermetically sealed electronic component. The method and associated apparatus includes the use of an evacuation chamber configured to placing the hermetically sealed electronic component within. The evacuation chamber is then evacuated of atmosphere to then determine an atmospheric pressure evacuation relationship or curve occurring inside the chamber that is, in turn, used to determine the integrity of the hermetically sealed electronic component. Further aspects may include evacuating the chamber through a mass spectrometer coupled to the evacuation chamber for chemical analysis of at least one of the evacuated atmosphere for making further determinations of the integrity of the hermetically sealed electronic component.