Hermetically Sealed Pressure Sensor With Diaphragm Isolation
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Solution Overview
Problem
Current pressure sensors face challenges in protecting their sensing dies from media interference in harsh environments, leading to damage and inefficiency, as existing solutions are either costly or oversized.
Innovation Solution
The development of a pressure sensor with a hermetically sealed component compartment that includes a processor and a sensing element, where the compartment is filled with a liquid and sealed by a diaphragm and a header with header pins, effectively isolating the sensing elements from media interference.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If sensing dies are exposed to media in harsh environments, then pressure sensing function is maintained, but the sensing dies are susceptible to damage from media
Solution Approach 1:
The pressure sensor is divided into separate compartments: a hermetically sealed component compartment containing the sensing die and processor, isolated from the fluid medium by a diaphragm. This segmentation protects the sensing elements while maintaining pressure sensing capability through the diaphragm's pressure transmission.
Solution Approach 2:
A diaphragm acts as an intermediary between the fluid medium and the sensing die. The diaphragm transmits pressure from the medium to the sensing die while preventing direct contact between the medium and the sensing elements, thus protecting them from media damage.
2Reliability
If hermetic sealing is implemented to protect sensing elements, then media isolation is achieved, but device complexity increases
Solution Approach 1:
The header serves multiple functions: it seals the component compartment hermetically, provides mounting for the diaphragm, and contains electrical connections through header pins. This merging of functions reduces the number of separate components needed for hermetic sealing.
Solution Approach 2:
The diaphragm serves dual purposes: it acts as a seal to maintain hermetic isolation while simultaneously transmitting pressure from the medium to the sensing die. This multi-functionality reduces the need for separate pressure transmission mechanisms.
3Reliability
If hermetic sealing with multiple components is used, then sensing element protection is improved, but manufacturing cost increases
Solution Approach 1:
Multiple components (seal, mounting structure, electrical connections) are merged into the header assembly, reducing the total number of parts and simplifying assembly operations. This integration lowers manufacturing complexity and cost while maintaining hermetic protection.
4Reliability
If hermetic sealing structure is implemented, then sensing element isolation is achieved, but sensor size increases
Solution Approach 1:
The sensing die and processor are nested within the hermetically sealed component compartment, which is integrated into the overall sensor housing. This nested arrangement minimizes the external dimensions of the sensor while maintaining internal hermetic isolation.
Solution Approach 2:
The header integrates multiple functions (sealing, mounting, electrical connections) into a single component, reducing the overall sensor size compared to using separate components for each function.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution provides effective media isolation for the sensing elements, enhancing the durability and reliability of the pressure sensors in harsh environments while maintaining cost-effectiveness and compact size.
Implementation Method 1
The diaphragm is configured to deflect in one direction or another based on a difference in pressure between the hermetically sealed component compartment and the fluid to be measured
Implementation Method 2
a hermetically sealed component compartment that includes a processor and a sensing element, where the compartment is filled with a liquid and sealed by a diaphragm and a header with header pins, effectively isolating the sensing elements from media interference
Data Source
AI summary
A pressure sensor and method of manufacturing the like are provided for determining a pressure of a fluid. An example pressure sensor includes a pressure sensor housing sealably attached to a diaphragm at a first end. The header includes a lip configured to engageably fit with the second end of the pressure sensor housing to create a hermetically sealed component compartment. The header also includes header pin(s) configured to transmit electrical signals between an interior and an exterior of the hermetically sealed component compartment. A sensing element and a processor are disposed within the hermetically sealed component compartment and in communication with one another. The sensing element is mounted to the processor within the hermetically sealed compartment. The corresponding method of manufacture is also provided.