Hermetic Pressure Sensor Membrane for High-Pressure Hydrogen
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Solution Overview
Problem
Pressure sensors face challenges in accurately measuring high pressures, such as those encountered in hydrogen containers, due to material brittleness and chemical interactions with hydrogen, which can lead to destruction of sensor materials.
Innovation Solution
A pressure sensor design featuring a hermetically sealed cavity with a flexible metal membrane, a sensor element, and a gaseous medium, which measures pressure changes through a sensor element like a MEMS device, resistant to hydrogen and other aggressive media, using a metal housing and membrane.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If pressure sensors are used to measure high pressures (700 bar or more) in hydrogen containers, then measurement capability is improved, but material brittleness and chemical degradation occur
Solution Approach 1:
The patent introduces a hermetically sealed cavity as an intermediary barrier between the hydrogen environment and the sensor element. The flexible membrane acts as another intermediary that transmits pressure while blocking direct contact between hydrogen and the sensor components, thereby enabling accurate measurement without material degradation
Solution Approach 2:
The hermetically sealed cavity creates a protected internal environment that isolates the sensor element from the aggressive hydrogen atmosphere. This inert-like protection allows the sensor to operate in high-pressure hydrogen environments without suffering chemical degradation or embrittlement
2Measurement precision
If hydrogen pressure increases to improve measurement range, then pressure measurement capability is improved, but hydrogen diffusion into materials accelerates
Solution Approach 1:
The flexible membrane and hermetic seal act as intermediaries that block hydrogen diffusion into the sensor element while still allowing pressure transmission. This enables the sensor to measure high pressures without the harmful effect of hydrogen diffusing into the materials
Solution Approach 2:
The flexible membrane serves as a thin film barrier that is permeable to pressure changes but impermeable to hydrogen molecules. This allows the sensor to detect high pressures while preventing hydrogen from penetrating into the sensor components
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The design provides precise pressure measurement across large ranges while resisting material degradation from hydrogen, ensuring durability and accuracy.
Implementation Method 1
a flexible membrane which, together with the housing, forms a hermetically closed cavity
Implementation Method 2
a gaseous medium in the cavity
Data Source
AI summary
In some embodiments, a pressure sensor may comprise a housing, a flexible membrane which, together with the housing, forms a hermetically closed cavity, a sensor element arranged in the hermetically closed cavity, and a gaseous medium in the hermetically closed cavity. The sensor may detect a change in a physical property, of the flexible membrane, associated with an external pressure pressing inward into the flexible membrane of the hermetically closed cavity.