Heterodyne Interferometer Cyclic Error Correction

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Solution Overview

Problem

Heterodyne interferometers face cyclic errors due to non-ideal characteristics, leading to ambiguities in displacement measurements, particularly at slow object movements, which are traditionally addressed through time-consuming electronic signal processing.

Innovation Solution

Incorporating birefringent optical elements and other optical elements to alter and filter wavelength components, reducing light leakage and minimizing cyclic errors by adjusting diattenuators, combiners, and birefringent optical elements to optimize the optical interference pattern.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If electronic circuitry is used to execute signal averaging and digital filtering to correct cyclic errors, then measurement precision is improved, but loss of time increases due to the time-consuming processing required

Engineering Contradiction:
Improvedisplacement measurement accuracyVSAvoidprocessing delay
Core Design Contradiction:
Measurement precisionVSLoss of time

Solution Approach 1:

The patent replaces the electronic signal processing system (mechanical/electrical system) with an optical system using birefringent optical elements. The cyclic error correction is achieved through optical interference and polarization effects rather than electronic filtering, thereby eliminating the time delay associated with electronic processing while maintaining measurement precision.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent changes the physical parameters of the light beams by introducing birefringent optical elements that alter the polarization state and wavelength components. This transforms the correction approach from post-processing electronic signals to real-time optical parameter modification, enabling faster correction without sacrificing accuracy.

Inventive Principle:
Principle #35Parameter changes

2Measurement precision

If traditional heterodyne interferometer configuration is used, then device complexity is reduced, but measurement precision deteriorates due to cyclic errors from light leakage and polarization imbalances

Engineering Contradiction:
Improvedisplacement measurement accuracyVSAvoidoptical system complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent introduces birefringent optical elements as intermediary components between the light source and the measurement beam. These elements act as mediators that correct polarization imbalances and reduce light leakage effects without requiring complete redesign of the interferometer architecture, thus improving precision while adding only moderate complexity.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The patent employs composite optical systems combining multiple wavelength components with different polarizations. By using composite light beams and birefringent materials with specific optical properties, the system achieves error correction through the interaction of multiple optical components, improving measurement precision through material properties rather than complex structural arrangements.

Inventive Principle:
Principle #40Composite materials

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach allows for rapid correction of cyclic errors, reducing delays in obtaining accurate displacement information by addressing light leakage and polarization imbalances within the interferometer, thereby enhancing measurement precision and speed.

Implementation Method 1

Incorporating birefringent optical elements and other optical elements to alter and filter wavelength components

Methodology Applied
Scientific EffectBirefringence: Birefringence

Implementation Method 2

A typical heterodyne interferometer generates an optical interference pattern by using a reference light beam and a measurement light beam

Methodology Applied
Scientific EffectOptical interference: Interference

Implementation Method 3

The measurement light beam includes a Doppler component that represents certain displacement characteristics of a moving object

Methodology Applied
Scientific EffectDoppler effect: Doppler Effect

Implementation Method 4

A typical heterodyne interferometer generates an optical interference pattern

Methodology Applied
Scientific EffectHeterodyne detection: Heterodyne

Implementation Method 5

Incorporating birefringent optical elements and other optical elements to alter and filter wavelength components

Methodology Applied
Scientific EffectOptical filtering: Filter (optical)

Data Source

PatentUS11236985B2Systems and methods for cyclic error correction in a heterodyne interferometer
Publication Date: 2022.02.01 KEYSIGHT TECHNOLOGIES INC
  • US11236985B2 patent drawing
  • US11236985B2 patent drawing
  • US11236985B2 patent drawing

AI summary

A heterodyne optical interferometer incorporates error correction elements to correct a cyclic error that may be present in an interferometric measurement. The cyclic error can be caused by various factors such as an imperfect polarization relationship between two wavelength components, deficiencies in optical propagation paths (such as light leakage), imperfect optical coatings, and/or imperfect components. The cyclic error, which typically manifests itself as erroneous displacement information characterized by a low velocity sinusoidal frequency component, can be reduced or eliminated by using birefringent optical elements and other optical elements to alter certain characteristics of one or both wavelength components and reduce light leakage components in one or more light propagation paths in the heterodyne optical interferometer.