Heterogeneous IC Package Interposer Design

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Solution Overview

Problem

Conventional multi-chip modules using heterogeneous ICs face challenges with large size, limited signal speeds, and increased costs due to solder bump formation processes in flip-chip bonding, particularly when connecting different types of ICs like semiconductor-based and silicon-based chips.

Innovation Solution

A package structure with a molded package encapsulating an optical chip and a semiconductor chip, utilizing a through-silicon-via structure and redistribution layers to shorten the conductive path, thereby reducing parasitic capacitance and resistance, and eliminating the need for bump formation processes, which includes a molding structure, passivation layers, and conductive structures to connect the chips efficiently.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If wire bonding is used for conductive connection between heterogeneous ICs, then the multi-chip module can be assembled, but the device size becomes large and signal speeds are limited

Engineering Contradiction:
Improveconductive connectionVSAvoiddevice size
Core Design Contradiction:
ReliabilityVSVolume of moving object

Solution Approach 1:

The patent introduces an interposer substrate as an intermediary component between the optical IC and silicon IC. This interposer provides a common bonding interface (both chips bond to the interposer using the same bump formation process) and enables shorter, lower-inductance connection paths compared to wire bonding, thereby reducing device size while maintaining reliable conductive connection.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Reliability

If flip-chip bonding with solder bump formation is used to connect different types of ICs, then conductive connection is achieved, but cost increases and overall yield decreases due to multiple different bump formation processes

Engineering Contradiction:
Improveconductive connectionVSAvoidmanufacturing cost and yield
Core Design Contradiction:
ReliabilityVSEase of manufacture

Solution Approach 1:

The interposer substrate serves as a universal interface that enables both the optical IC and silicon IC to be bonded using the same bump formation process (e.g., all using Cu-Cu or all using Sn-based bumps). This universal approach eliminates the need for multiple different bump formation processes, reducing manufacturing complexity, cost, and improving overall yield.

Inventive Principle:
Principle #6Universality (Multi-functionality)

3Reliability

If conventional multi-chip module assembly is used, then heterogeneous ICs can be connected, but parasitic capacitance and resistance increase due to longer conductive paths

Engineering Contradiction:
Improveelectrical connectionVSAvoidpower loss
Core Design Contradiction:
ReliabilityVSLoss of energy

Solution Approach 1:

The interposer architecture transitions from a planar wire-bonding connection to a three-dimensional flip-chip-to-interposer-to-flip-chip structure. This dimensional change enables significantly shorter conductive paths through the vertical stacking arrangement, reducing parasitic capacitance and resistance, and thereby lowering power loss while maintaining electrical connection reliability.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Data Source

PatentUS10748825B2Package and method for integration of heterogeneous integrated circuits
Publication Date: 2020.08.18 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
  • US10748825B2 patent drawing
  • US10748825B2 patent drawing
  • US10748825B2 patent drawing

AI summary

In some embodiments, the present disclosure relates to a package for holding a plurality of integrated circuits. The package includes a first conductive pad disposed over a first substrate and a second conductive pad disposed over a second substrate. The second conductive pad is a multi-layer structure having an uppermost metal layer including titanium or nickel. A molding structure surrounds the first substrate and the second substrate. A conductive structure is over the first substrate and the second substrate. The conductive structure is conductively coupled to the second conductive pad.