Heterogeneous Magnetic Memory Elements via Shadow-Mask Deposition

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Solution Overview

Problem

Magnetic memory systems face a tradeoff between competing performance parameters such as data retention, thermal stability, write speed, and power consumption, where designs for high retention and stability require high energy and long write times, while designs for low power and fast write times compromise on retention and stability.

Innovation Solution

A method for manufacturing a magnetic memory system that incorporates heterogeneous magnetic memory elements, using shadow-masks to deposit different materials in specific areas, allowing for the creation of memory elements with optimized performance parameters such as latency, retention, switching energy, and magnetic anisotropy, by forming a first type of magnetic elements in one region and a second type in another, with a performance altering layer and a conductive dummy layer if necessary.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If magnetic memory elements are designed for high data retention and thermal stability, then reliability is improved, but energy consumption increases and write speed decreases

Engineering Contradiction:
Improvedata retention and thermal stabilityVSAvoidenergy consumption and write time
Core Design Contradiction:
ReliabilityVSUse of energy by moving object

Solution Approach 1:

The patent applies local quality by creating different types of magnetic memory elements within the same array, where first-type elements have structures optimized for high data retention and thermal stability, while second-type elements have structures optimized for low power consumption and fast write times. This is achieved through selective deposition of performance-altering layers in specific regions using shadow masks, allowing each local region to have tailored properties suitable for its intended function.

Inventive Principle:
Principle #3Local quality

2Adaptability or versatility

If a single memory chip contains heterogeneous memory element types, then adaptability is improved, but device complexity increases

Engineering Contradiction:
Improveperformance optimizationVSAvoidmanufacturing process complexity
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The patent merges multiple memory element types into a single memory chip array, integrating both first-type and second-type magnetic memory elements in one device. The manufacturing process combines standard deposition techniques with shadow-mask-based selective deposition, allowing heterogeneous elements to be fabricated simultaneously in different regions of the same chip without requiring separate manufacturing lines or post-fabrication modifications.

Inventive Principle:
Principle #5Merging (Combining)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enables a magnetic memory system that optimizes write speed, reduces power consumption, and enhances thermal stability, effectively addressing the tradeoff between competing performance interests by utilizing different memory element types within a single system.

Implementation Method 1

depositing a first magnetic element material using a first shadow-mask that is configured to allow deposition in a first area, and then depositing a second magnetic element material using a second shadow-mask that is configured to allow deposition in a second area

Methodology Applied
Scientific EffectShadow-mask deposition: Physical Vapour Deposition

Implementation Method 2

The switching of the MTJ element between high and low resistance states results from electron spin transfer. An electron has a spin orientation. Generally, electrons flowing through a conductive material have random spin orientations with no net spin orientation. However, when electrons flow through a magnetized layer, the spin orientations of the electrons become aligned so that there is a net aligned orientation of electrons flowing through the magnetic layer

Methodology Applied
Scientific EffectElectron spin transfer:

Implementation Method 3

Magnetic Random-Access Memory (MRAM) is a non-volatile data memory technology that stores data using magnetoresistive cells such as Magnetoresistive Tunnel Junction (MTJ) cells. The first magnetic layer, which can be referred to as a reference layer, has a magnetization that is fixed in a direction that is perpendicular to that plane of the layer. The second magnetic layer, which can be referred to as a magnetic free layer, has a magnetization that is free to move

Methodology Applied
Scientific EffectMagnetoresistive tunneling: Magnetoresistance

Data Source

PatentUS10971681B2Method for manufacturing a data recording system utilizing heterogeneous magnetic tunnel junction types in a single chip
Publication Date: 2021.04.06 INTEGRATED SILICON SOLUTION CAYMAN INC
  • US10971681B2 patent drawing
  • US10971681B2 patent drawing
  • US10971681B2 patent drawing

AI summary

A method for manufacturing an array of magnetic memory elements, wherein first memory element types are formed in a first region and second type of magnetic memory element types are formed in a second region. A shadow-mask is used during deposition to limit the deposition of at least one layer of memory element material to only the second region wherein the second memory element types are to be formed. The method can include depositing full film magnetic memory element layers over an entire substrate and then using the shadow-mask to deposit at least one performance altering material in the second memory element region. Alternatively, a first shadow-mask can be used to deposit a series of first memory element layers in a first region, and a second shadow-mask can be used to deposit a plurality of second memory element layers in a second region.