Hexachlorodisilane Production via Solid Adsorber Selective Conversion
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Solution Overview
Problem
Current methods for producing hexachlorodisilane (HCDS) in the microelectronics industry face challenges such as contamination from impurities, complex separation processes, and low yields due to similar boiling points of byproducts, leading to undesired doping effects and increased costs.
Innovation Solution
A process involving the contact of partially hydrogenated chlorodisilanes with a solid non-functionalized adsorber material like silicates, aluminosilicates, or organic polymers, which selectively converts these compounds into HCDS without the need for additional catalysts or impurities, allowing for high yields and reduced impurity levels.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If distillative purification is used to separate HCDS from byproducts, then purity can be improved, but the process becomes complex and time-consuming due to similar boiling points
Solution Approach 1:
The invention changes the separation mechanism from thermal (distillation based on boiling point differences) to chemical (selective reaction with AlCl3). By changing the state of partially hydrogenated disilanes from inert to reactive through parameter change (presence of AlCl3), the separation becomes based on chemical reactivity rather than physical properties, simplifying the process while maintaining high purity
Solution Approach 2:
AlCl3 acts as an intermediary substance that selectively reacts with partially hydrogenated disilanes to form adducts. This intermediary enables the separation of HCDS from impurities without requiring direct distillation of the mixture, thereby reducing process complexity while achieving high purity
2Productivity
If chlorine is added to chlorinate partially hydrogenated disilanes, then HCDS yield can be improved, but impurities are introduced and apparatus cost increases
Solution Approach 1:
The invention uses AlCl3 as a disposable reagent that can be easily removed after reaction. Although AlCl3 introduces temporary impurities during the process, these are readily eliminated through simple filtration or decantation, and the reagent itself is inexpensive and can be disposed of or regenerated without complex procedures
Solution Approach 2:
The invention converts the harmful effect of potential impurity introduction into a benefit by using AlCl3's ability to form stable, easily separable adducts with partially hydrogenated disilanes. The apparent harm of adding another substance is transformed into the benefit of selective complexation that facilitates separation and purification
3Productivity
If activated carbon is used to convert partially hydrogenated disilanes into HCDS, then HCDS yield increases, but costly and complex distillative removal of unconverted disilanes is still required
Solution Approach 1:
The invention changes the reaction mechanism from catalytic conversion (activated carbon) to selective complexation (AlCl3 adduct formation). This parameter change in reaction type enables complete consumption of partially hydrogenated disilanes without leaving unreacted starting material that would require time-consuming distillation for removal
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This process achieves an additional yield of HCDS of over 30% by weight, significantly reducing the proportion of unconverted partially hydrogenated disilanes and maintaining high purity, thus addressing the limitations of existing methods.
Implementation Method 1
contacting at least one partially hydrogenated chlorodisilane of general formula HxSi2Cl(6-x) where x=1 to 5 in the liquid state with a solid non-functionalized adsorber material
Data Source
AI summary
A process for obtaining hexachlorodisilane and uses for the same. The process includes contacting at least one partially hydrogenated chlorodisilane of general formula HxSi2Cl(6-x) where x is from 1 to 5 in the liquid state with a solid non-functionalized adsorber material that is selected from the group comprising silicates, aluminosilicates, organic polymer and/or combinations thereof. The process also includes optionally separating the hexachlorodisilane and/or optionally separating the adsorber material.