Hexagonal Beam Tube Layout for Accelerator Access and Footprint

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Conventional beam tubes in linear accelerators have limited access to the interior for maintenance and service due to the mounting of multiple components, leading to cumbersome and time-consuming operations, and they occupy large footprints in manufacturing facilities.

Innovation Solution

A hexagonal beam tube design with six adjoining sidewalls, featuring openings and access doors, allowing easier access to the interior for maintenance and accommodating more components within a smaller footprint.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If multiple components (resonators, turbomolecular pumps, quadrupole magnets) are mounted to the sidewalls of a conventional square or diamond-shaped beam tube, then the linear accelerator can accommodate all necessary components for ion beam acceleration and focusing, but the space remaining on the sidewalls for providing access to the interior of the beam tube is severely limited, making service and maintenance difficult, cumbersome, and time-consuming

Engineering Contradiction:
Improvecomponent accommodationVSAvoidmaintenance accessibility
Core Design Contradiction:
Adaptability or versatilityVSEase of repair

Solution Approach 1:

The beam tube cross-section is changed from a square or diamond shape (4 sides) to a hexagon shape (6 sides). This dimensional change in the geometric configuration provides additional sidewalls that can be dedicated to component mounting while preserving other sidewalls for maintenance access. The hexagonal geometry allows separation of functions across different dimensions of the same structure.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The hexagonal beam tube divides the sidewalls into different functional zones: some sidewalls are designated for mounting components (resonators, pumps, magnets) while other sidewalls are reserved for providing access to the interior. This segmentation of the beam tube perimeter allows simultaneous optimization for both component accommodation and maintenance accessibility.

Inventive Principle:
Principle #1Segmentation

2Reliability

If a conventional square or diamond-shaped beam tube is used with all necessary components mounted to the sidewalls, then the linear accelerator can function properly, but the footprint becomes large and occupies valuable space within the manufacturing facility

Engineering Contradiction:
Improveaccelerator functionalityVSAvoidfootprint
Core Design Contradiction:
ReliabilityVSArea of stationary object

Solution Approach 1:

By changing the cross-sectional geometry from square/diamond to hexagon, the beam tube achieves more efficient spatial utilization. The hexagonal shape provides better packing efficiency and allows for more compact arrangement of components around the beam tube, thereby reducing the overall footprint of the linear accelerator while maintaining all necessary functionalities.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

3Ease of repair

If openings are formed in the sidewalls of the beam tube to provide access to the interior, then maintenance and service operations become easier and less time-consuming, but the structural integrity and vacuum sealing of the beam tube may be compromised

Engineering Contradiction:
Improvemaintenance accessibilityVSAvoidvacuum sealing
Core Design Contradiction:
Ease of repairVSReliability

Solution Approach 1:

Instead of creating openings directly through the beam tube wall which would compromise vacuum sealing, access doors are extracted as separate removable components. These access doors can be opened for maintenance and then closed and sealed to restore the vacuum integrity. The sealing mechanism is extracted as a distinct functional element that can be engaged or disengaged as needed.

Inventive Principle:
Principle #2Taking out (Extraction)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enhances maintenance accessibility and reduces the overall size of the linear accelerator, facilitating efficient component installation and service while optimizing space utilization.

Implementation Method 1

at least one of the at least five adjoining sidewalls of the beam tube has an opening formed therein for providing access to an interior of the beam tube

Methodology Applied
Scientific EffectVacuum: Vacuum

Implementation Method 2

a series of resonators containing AC or RF electrodes arranged around the beam tube for accelerating the ion beam to increasingly higher energies along the succession of resonators

Methodology Applied
Scientific EffectElectromagnetic acceleration: Electromagnetic Induction

Implementation Method 3

a plurality of quadrupole magnets may be mounted to the sidewalls for focusing and steering an ion beam within the beam tube

Methodology Applied
Scientific EffectMagnetic focusing: Magnetic Field

Data Source

PatentUS20250275052A1Beam tube and layout for linear accelerator
Publication Date: 2025.08.28 APPLIED MATERIALS INC
  • US20250275052A1 patent drawing
  • US20250275052A1 patent drawing
  • US20250275052A1 patent drawing

AI summary

An ion implantation system including an ion source for generating an ion beam, an end station for holding a substrate to be implanted by the ion beam, and a linear accelerator disposed between the ion source and the end station and adapted to accelerate the ion beam, the linear accelerator including a beam tube for transmitting the ion beam, the beam tube having at least five adjoining sidewalls, at least one resonator coupled to the beam tube, and at least one turbomolecular pump coupled to the beam tube, wherein at least one of the at least five adjoining sidewalls of the beam tube has an opening formed therein for providing access to an interior of the beam tube.