High-Frequency Pulse Power Supply With Phase Jitter Compensation
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Solution Overview
Problem
Conventional high-frequency power supply devices experience phase unevenness and jitter in high-frequency pulses due to independent operation of synchronous and clock pulse generators, leading to unstable output waveforms and requiring complex additional configurations like matching networks for plasma generation devices.
Innovation Solution
A high-frequency power supply device that includes a synchronous pulse generation mechanism, an output level setting mechanism, an oscillation waveform setting mechanism, and an oscillation mechanism, which work together to generate high-frequency pulses with consistent phases by detecting period times and phase differences between synchronous and clock pulses, and adjusting oscillation frequencies and pulse numbers accordingly.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If synchronous pulse generator and clock pulse generator operate independently, then device complexity is reduced and ease of operation is improved, but phase uniformity and output waveform stability deteriorate
Solution Approach 1:
The patent implements a feedback control mechanism where the actual phase of output waveforms is monitored and compared against the ideal synchronous phase. When phase deviations are detected due to independent generator operation, the system adjusts the clock pulse timing or synchronous pulse timing to compensate for the phase drift, thereby maintaining phase uniformity while allowing independent generator operation
Solution Approach 2:
The patent dynamically adjusts timing parameters (phase offsets, pulse widths, or intervals) of either the synchronous pulse or clock pulse based on detected phase deviations. By changing these temporal parameters in real-time, the system compensates for phase unevenness caused by independent generator operation while maintaining the simplicity of separate generator design
2Reliability
If matching network is added for feedback control, then plasma generation stability is improved, but device complexity and control complexity increase
Solution Approach 1:
The patent introduces a phase detection and control unit as an intermediary between the independent pulse generators and the plasma processing chamber. This intermediary monitors phase relationships and makes real-time adjustments to timing parameters, achieving plasma generation stability without requiring complex matching networks or impedance transformation circuits
Solution Approach 2:
The system implements feedback control by monitoring the actual phase of output waveforms and adjusting the timing of synchronous or clock pulses accordingly. This feedback mechanism stabilizes plasma generation by compensating for phase deviations, achieving reliability improvement without adding the complexity of traditional matching networks
Data Source
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AI summary
Provided are a high-frequency power supply device and an output control method therefor which are capable of constantly keeping the phase of the outputted high-frequency pulse uniform even in a structure in which the synchronizing pulse and the clock pulse are generated separately. A high-frequency power supply device and an output control method therefor for outputting a high-frequency pulse to a target device on the basis of a synchronizing pulse and a clock pulse, wherein: the period interval of one period of the synchronizing pulse is detected; the phase difference between the synchronizing pulse and the clock pulse during the previous one period is determined; the number of pulses and oscillation frequency of oscillation in the subsequent period is calculated on the basis of the period interval and the phase difference; a clock pulse is generated on the basis of the oscillation frequency signal; and a number of pulses and oscillation frequency for the subsequent period which will cancel the phase difference in the previous one period are determined in a manner such that the phase remains constant after the period interval of the subsequent period elapses when forming a high-frequency pulse on the basis of the period reference signal, the level setting signal, the pulse number signal and the clock pulse.