HHG Radiation Source Beam Shaping and Blocking for SXR Focusability
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Solution Overview
Problem
Existing High Harmonic Generation (HHG) sources face challenges in controlling the focusability of Soft X-ray (SXR) and Extreme Ultraviolet (EUV) beams due to limitations in intensity distribution of the drive radiation, and in separating drive radiation from emitted radiation to prevent interference in metrology tools, which affects the precision of lithographic and metrology processes.
Innovation Solution
A radiation source arrangement that includes a beam block and a beam shaper to control the spatial distribution of the drive radiation, combined with a lens system to form images at specific planes, allowing for precise control of the intensity distribution and separation of drive and emitted radiation, enabling improved focusability and separation of the SXR/EUV beams.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a beam block is used to separate drive radiation from emitted radiation, then separation precision is improved, but device complexity increases due to additional optical components
Solution Approach 1:
The patent divides the radiation beam path into distinct regions using a beam block that selectively blocks drive radiation while allowing emitted radiation to pass through. This segmentation separates the two radiation types spatially, enabling precise control over which radiation reaches downstream components.
Solution Approach 2:
The beam block acts as an intermediary component positioned in the radiation path to mediate between the drive radiation source and the emitted radiation detection system. It selectively intercepts drive radiation while permitting emitted radiation to continue, thus protecting sensitive downstream optics from damage.
2Manufacturing precision
If the drive radiation intensity distribution is tightly controlled for HHG generation, then manufacturing precision is improved, but device complexity increases due to additional beam shaping components
Solution Approach 1:
The patent employs a beam shaper to create a specific intensity distribution profile across the drive radiation beam cross-section. This local quality control ensures that the radiation intensity is optimized at different spatial locations within the interaction region, maximizing HHG generation efficiency while maintaining precise control over the beam profile.
Solution Approach 2:
The beam shaper modifies the drive radiation beam parameters, specifically transforming the intensity distribution from a uniform or Gaussian profile to a tailored profile with enhanced central concentration. This parameter change optimizes the interaction between drive radiation and the medium for efficient high harmonic generation.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution enhances the focusability and separation of SXR/EUV beams, leading to improved metrology tool precision and lithographic capabilities, allowing for smaller feature sizes and more accurate measurements in semiconductor manufacturing.
Implementation Method 1
a beam block positioned upstream of the interaction plane at a beam block plane and configured to partially block the drive radiation beam
Implementation Method 2
at least one lens positioned upstream of the interaction plane and downstream of the beam block plane, wherein the lens is positioned such that an image of the spatial distribution of the drive radiation beam is formed at the interaction plane
Implementation Method 3
a beam shaper positioned upstream of the beam block plane at an object plane and configured to control a spatial distribution of the drive radiation beam
Implementation Method 4
an interaction between a drive radiation beam and a medium for generation of emitted radiation by high harmonic generation
Data Source
AI summary
Methods and corresponding apparatus operable to cause an interaction between a drive radiation beam and a medium for generation of emitted radiation by high harmonic generation, the arrangement comprising: an interaction region positioned at an interaction plane and configured to receive the medium; a beam block positioned upstream of the interaction plane at a beam block plane and configured to partially block the drive radiation beam; a beam shaper positioned upstream of the beam block plane at an object plane and configured to control a spatial distribution of the drive radiation beam; and at least one lens positioned upstream of the interaction plane and downstream of the beam block plane, wherein the lens being positioned such that an image of the spatial distribution of the drive radiation beam is formed at the interaction plane.