High-Damping RC Lattice Beam for EUV Vibration Control
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Solution Overview
Problem
Current lattice beam technologies are inadequate for achieving ultrafine vibration control necessary for the latest semiconductor exposure apparatuses, particularly those using extreme ultraviolet (EUV) rays, as they require vibration suppression at the nanometer level, which is beyond the capabilities of conventional designs, leading to increased facility sizes and decreased manufacturability.
Innovation Solution
The development of a high-damping RC lattice beam utilizing polymer concrete with a damping ratio greater than 15%, which includes a polymer mixed in during the concrete component mixing process, or as a sole binder, or fabricated by impregnating pores in hardened concrete, allowing for effective vibration damping while maintaining the size of conventional lattice beams.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If conventional lattice beam designs are used, then the structure size can be maintained, but ultrafine vibration control at the nanometer level cannot be achieved
Solution Approach 1:
The patent changes the material parameter by using high-damping concrete with a damping ratio of not less than 15%, which is three times or more that of conventional concrete. This material parameter change enables ultrafine vibration control at the nanometer level without increasing structure size or complexity
Solution Approach 2:
The patent employs composite materials by incorporating rubber particles or other damping materials into the concrete matrix to create high-damping concrete. This composite approach achieves superior vibration damping performance while maintaining the conventional lattice beam structure
2Reliability
If the lattice beam size is increased to improve vibration damping, then vibration suppression capability is enhanced, but facility size and manufacturing complexity increase
Solution Approach 1:
Instead of changing the geometric parameters (size) of the lattice beam, the patent changes the material parameter by using high-damping concrete with a damping ratio of not less than 15%. This allows achieving superior vibration suppression capability while maintaining the original lattice beam dimensions
Solution Approach 2:
The patent substitutes the mechanical vibration suppression approach (increasing structure size and mass) with a material-based approach (high-damping concrete). The inherent damping properties of the material replace the need for larger structural dimensions
3Manufacturing precision
If conventional concrete is used in lattice beams, then manufacturing is simple, but damping ratio is insufficient for EUV exposure apparatus
Solution Approach 1:
The patent creates composite concrete by incorporating rubber particles or other damping materials into the conventional concrete mixture. This composite material approach achieves a damping ratio of not less than 15% while using relatively simple mixing procedures that can be integrated into existing concrete production processes
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The high-damping RC lattice beam effectively suppresses fine-scale vibrations at the nanometer level, enhancing the precision and productivity of semiconductor production by reducing defects and improving manufacturability, thus supporting the use of advanced EUV exposure apparatuses.
Implementation Method 1
a concrete included in the lattice beam is designed to have a damping ratio greater than 15%
Implementation Method 2
The high-damping RC lattice beam effectively suppresses fine-scale vibrations at the nanometer level
Data Source
AI summary
An RC lattice beam is provided that can greatly dampen the transfer of vibrations in particular. As the concrete included in the RC lattice beam is polymer concrete that contains a polymer, fine-scale vibrations that may otherwise affect exposure apparatuses may be effectively dampened, while the depth of the conventional lattice beam may be kept the same. Thus, a high-damping RC lattice beam is provided that is capable of maximizing the performance of a precision exposure apparatus by reducing the defect rate and improving productivity.