High-Density Channel Spectral Imaging for Thin Film Quality
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Solution Overview
Problem
Conventional thin film quality detecting devices struggle to achieve rapid and accurate multi-channel measurements with high spectral resolution, limiting their applicability to online detection due to issues like low spectral resolution, aberration, and time-consuming data collection.
Innovation Solution
A high-density channels detecting device incorporating a light source, collimator, beam splitter, and high-density spectral imaging device with a multi-channel kernel module, utilizing optical fiber bundles and image-side telecentric lenses to ensure parallel light incidence on the diffraction grating, enhancing spectral resolution and enabling simultaneous multi-channel measurement.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a single point thin film measuring device is used, then the measurement accuracy is high, but the detection time is long and cannot be used in online detection
Solution Approach 1:
The patent divides the detection field into multiple channels (e.g., 32 channels) along the spatial direction, allowing simultaneous measurement of multiple points on the thin film sample. This segmentation enables parallel acquisition of spectral information from different locations, dramatically reducing detection time while maintaining measurement accuracy through multi-channel spectral imaging.
Solution Approach 2:
The patent transitions from single-point measurement to two-dimensional spatial-spectral imaging by introducing a spatial dimension through the use of a linear array detector and diffraction grating. This allows simultaneous capture of spectral information across multiple spatial positions, converting a time-consuming sequential measurement process into a parallel two-dimensional imaging process suitable for online detection.
2Productivity
If a filtering image thin film measuring device is used, then two-dimensional film quality measurement is achieved, but the spectral resolution is low and measurement accuracy is limited
Solution Approach 1:
The patent replaces the filtering method with a diffraction grating-based spectral dispersion approach. Instead of using broad bandpass filters that limit spectral resolution, the system uses a diffraction grating to disperse light into its spectral components, which are then detected by a linear array detector. This parameter change in the optical measurement approach enables high spectral resolution while maintaining two-dimensional spatial measurement capability.
3Productivity
If a grating imaging spectrometer architecture is used, then multi-channel spectral information is obtained simultaneously, but the spectral resolution is degraded due to aberration
Solution Approach 1:
The patent introduces an intermediary optical system consisting of a collimating lens and a focusing lens positioned before and after the diffraction grating, respectively. The collimating lens ensures that light rays incident on the grating are parallel, and the focusing lens converges the diffracted rays onto the detector plane. This intermediary optical arrangement eliminates aberrations that would otherwise degrade spectral resolution, while maintaining the simultaneous multi-channel measurement capability.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The device achieves high spectral resolution by dividing the spectral range into more than one hundred parts, allowing for accurate, one-dimensional continuous or discrete multi-channel thin film quality information, which can be combined into two-dimensional data, facilitating rapid and precise online detection of both transparent and opaque samples.
Implementation Method 1
a collimator, arranged in front of the light source and on a beam path of the light beam for collimating the light beam as a parallel light beam
Implementation Method 2
a beam splitter for reflecting the light beam incident from the collimator to the sample and for transmitting the light beam reflected by the sample
Implementation Method 3
The high-density channels spectral imaging device comprises a light collector and a multi-channel kernel module for receiving the light beam from the light collector, wherein by using the light collector, the light beam incident to the multi-channel kernel module is parallel to an optical axis of the multi-channel kernel module
Implementation Method 4
A photodiode array detector 16 receives an optical signal, so as to obtain a reflection spectrum of the sample
Data Source
AI summary
A high-density channels detecting device for detecting a sample is provided. The high density detecting-device has a light source for emitting a light beam, a collimator, a beam splitter, and a high-density channels imaging device. The collimator arranged on the beam path is used for collimating the emitted light beam. The beam splitter reflects the light beam incident from the collimator to the sample, and the light beam reflected by the sample passes through the beam splitter. The imaging device receives the light beam passing through the beam splitter, and has a light collector and a multi-channel kernel module for receiving the light beam from the light collector. By using the light collector, the light beam incident to the kernel module is parallel to the optical axis of the kernel module.