High Frequency Generator IQ Modulation Control
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Solution Overview
Problem
Existing high frequency generators used in plasma processing apparatuses face inaccuracies in controlling power and phase of high frequency outputs due to errors in estimating traveling and reflected waves, which affects the precision of plasma processing.
Innovation Solution
A high frequency generator is designed with a vector multiplier, amplifier, circulator, directional coupler, and control unit that performs IQ modulation and matrix operations to accurately determine and correct the in-phase and orthogonal components of traveling and reflected waves, reducing errors in power and phase control through a system of matrix operations and feedback control.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If a directional coupler is used to estimate power and phase of high frequency output, then power and phase control can be implemented, but estimation errors occur leading to reduced accuracy
Solution Approach 1:
The patent replaces the conventional directional coupler-based estimation method with an IQ modulation system using a vector multiplier. This substitution enables precise control of power and phase by directly manipulating in-phase and orthogonal signal components, eliminating the estimation errors inherent in directional coupler methods.
Solution Approach 2:
The patent changes the control parameters from estimated power and phase values to direct IQ modulation parameters (in-phase and orthogonal signal levels). By controlling the levels of these two signal components, the system achieves accurate power and phase control without estimation errors, as the relationship between IQ parameters and output characteristics is deterministic rather than estimated.
2Measurement precision
If matrix operations are performed to correct estimation errors, then accuracy of power and phase control is improved, but computational complexity increases
Solution Approach 1:
The patent performs preliminary determination of the relationship between IQ modulation parameters and output power/phase characteristics. By pre-establishing this relationship through the matrix operation framework, the system avoids complex real-time calculations during operation, reducing computational complexity while maintaining high accuracy in power and phase control.
3Measurement precision
If IQ modulation with vector multiplier is used to control power and phase, then accuracy is improved, but device complexity increases due to additional components
Solution Approach 1:
The patent integrates the vector multiplier and IQ modulation functionality into the existing high frequency generation system. The vector multiplier serves multiple functions: generating the high frequency signal, applying IQ modulation, and enabling precise power and phase control. This multi-functionality reduces the need for separate dedicated components, thereby limiting the increase in overall device complexity.
Solution Approach 2:
The patent introduces the vector multiplier as an intermediary device between the signal source and the output. This intermediary enables precise control of power and phase through IQ modulation without requiring fundamental changes to the existing system architecture, allowing accurate control to be achieved with minimal additional complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution enhances the accuracy of power and phase control for high frequency outputs, improving the precision of plasma processing by minimizing errors and enabling high-speed control without mechanical components, suitable for applications like atomic layer deposition and direct heating.
Implementation Method 1
The vector multiplier 12 is configured to generate a modulated wave by applying IQ modulation to a high frequency original signal
Implementation Method 2
The amplifier 14 is configured to generate an amplified high frequency by amplifying the modulated wave
Implementation Method 3
The circulator 16 is configured to receive the amplified high frequency from the amplifier through the first port, allow a high frequency inputted into the first port to be outputted through the second port
Implementation Method 4
The directional coupler 20 is configured to output a first high frequency including a part of traveling waves propagating from the amplifier to the output unit and output a second high frequency including a part of reflected waves returning to the output unit
Data Source
AI summary
In a high frequency generator, a high frequency generated by an IQ modulation of a vector multiplier and a amplification of an amplifier is outputted through an output unit. An directional coupler outputs a first high frequency including a part of traveling waves and a second high frequency including a part of reflected waves. A control units obtains an estimated value of each of an in-phase component and an orthogonal component of the traveling waves in the output unit, and an in-phase component and an orthogonal component of the reflected waves in the output unit by performing a first matrix operation that is an operation of four polynomials, each including as multi-variables an in-phase component and an orthogonal component of a first high frequency and an in-phase component and an orthogonal component of the second high frequency.