High Frequency Heating Apparatus Uniform Substrate Heating
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Solution Overview
Problem
High frequency heating technologies face challenges in achieving uniform heating and efficient energy use when applied to large glass substrates due to non-uniform electric field distribution and interference between multiple high frequency generators, leading to localized heating and reduced efficiency.
Innovation Solution
A high frequency heating apparatus comprising multiple high frequency generators and a reflector that partitions the generators to prevent interference, forming uniform electric fields over the substrate by strategically positioning reflective portions and holes to ensure even heat distribution.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Speed
If multiple high frequency generators are used to increase temperature growth rate, then heating speed is improved, but electric field interference causes localized heating and reduced efficiency
Solution Approach 1:
The patent divides the heating system into multiple independent high frequency generator units, each responsible for a specific zone. This segmentation allows each generator to operate independently without interfering with others, eliminating the electric field interference problem while maintaining high temperature growth rates through coordinated operation of multiple units
Solution Approach 2:
The patent implements zone-based heating where each high frequency generator targets a specific local area of the glass substrate. By optimizing the electric field distribution in each zone separately and controlling generators independently, the system achieves uniform heating across the entire substrate without localized overheating, thereby maintaining high heating efficiency
2Area of stationary object
If multiple high frequency generators are used to heat large glass substrates, then heating coverage is improved, but electric field distribution becomes non-uniform causing hot spots
Solution Approach 1:
The patent segments the large glass substrate into multiple heating zones, with each zone served by a dedicated high frequency generator. This segmentation ensures that each generator operates within its designated area, preventing electric field overlap and interference that would cause hot spots, while collectively covering the entire large substrate area
Solution Approach 2:
The patent designs the system to achieve equipotential electric field distribution across each heating zone by optimizing generator positioning and power control. This ensures uniform energy distribution within each zone, and through coordinated control of multiple generators, achieves uniform temperature distribution across the entire large substrate area
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enables uniform heating of large glass substrates with increased temperature growth rates and improved energy efficiency, preventing localized heating and maintaining consistent electric field distribution.
Implementation Method 1
a high frequency generator which generates high frequency to heat a substrate
Implementation Method 2
a reflector which reflects the high frequency generated by the high frequency generator toward the substrate
Data Source
Figure 1A~1B
Figure 2A~2B
Figure 3~4A
AI summary
A high frequency heating apparatus which heats a substrate by applying high frequency waves. The high frequency heating apparatus includes a high frequency generator which generates high frequency to heat the substrate and a reflector which reflects the high frequency generated by the high frequency generator toward the substrate.