High Frequency Power Device Reflected Wave Cancellation
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Solution Overview
Problem
High frequency power devices with different output frequencies generate significant reflected waves, leading to adverse effects on amplifying elements due to impedance modulation, resulting in high reflected wave power that can damage the equipment.
Innovation Solution
A high frequency power device with a high frequency detector, oscillators, phase adjuster, modulation index adjuster, modulator, and output unit that modulates the first oscillating signal with a second oscillating signal to reduce reflected wave power by adjusting phase and modulation index, allowing for cancellation of the reflected wave.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If high frequency power devices with different output frequencies are used to generate plasma and bias, then plasma processing efficiency is improved, but reflected wave power increases causing damage to amplifying elements
Solution Approach 1:
The patent converts the harmful reflected wave into a beneficial control signal by detecting the reflected wave voltage and using it to generate a modulation signal that actively cancels the reflected wave through frequency modulation, thereby protecting the amplifying element while maintaining plasma processing efficiency
Solution Approach 2:
The patent implements a feedback mechanism where the reflected wave voltage detected by the detector is fed back to the modulator to dynamically adjust the frequency modulation, creating a closed-loop control system that continuously compensates for reflected wave variations caused by plasma impedance changes
2Reliability
If frequency modulation is used to reduce reflected wave power, then amplifying element protection is improved, but device complexity increases
Solution Approach 1:
The patent makes the existing modulator perform an additional function of reflected wave cancellation through frequency modulation, rather than adding a separate cancellation device, thereby reducing overall system complexity while maintaining amplifying element protection
Solution Approach 2:
The patent combines the reflected wave detection function, modulation signal generation, and frequency modulation into a unified control mechanism within the existing high frequency power device architecture, integrating multiple protective functions without increasing device complexity
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively reduces reflected wave power, minimizing the risk of damaging amplifying elements and enabling miniaturization and cost reduction by minimizing the need for high voltage and temperature resistance components.
Implementation Method 1
a modulator (24), outputting a modulated signal obtained by modulating, in frequency, the first oscillating signal by the second oscillating signal
Data Source
AI summary
A high frequency power device includes a first oscillator outputting a first oscillating signal oscillated by a first predetermined frequency and a second oscillator outputting a second oscillating signal oscillated by a second predetermined frequency. A phase adjuster adjusts the phase of the second oscillating signal and a modulation index adjuster adjusts a modulation index of the second oscillating signal. A modulator outputs a modulated signal obtained by modulating, in frequency, the first oscillating signal by the phase adjusted and modulated second oscillating signal, and a high frequency output unit amplifies and outputs the modulated signal outputted from the modulator.