High Frequency Power Supply Impedance Control
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Solution Overview
Problem
Existing high frequency power supply devices for plasma processing are complex and costly due to the need for DC-DC converters to control direct current output voltage, which complicates the configuration and worsens control responsiveness, and are challenging to control efficiently at high frequencies.
Innovation Solution
A high frequency power supply device with a direct current power supply unit that rectifies and smooths alternating current voltage, an inverter circuit to convert it into alternating current, and a power control unit that adjusts the load side impedance using variable reactance elements to maintain power within a set range, eliminating the need for DC-DC converter voltage control and simplifying the configuration.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If a DC-DC converter is added to control the direct current output voltage, then the power control capability is improved, but the device complexity increases and control responsiveness deteriorates
Solution Approach 1:
The patent removes the DC-DC converter from the system and extracts the power control function to the load side through impedance adjustment. Instead of controlling power at the input side via DC-DC conversion, the invention controls the equivalent impedance on the load side to achieve power regulation, thereby simplifying the overall configuration while maintaining power control capability.
Solution Approach 2:
The patent introduces an impedance adjustment mechanism as an intermediary between the inverter and the load. By adjusting the equivalent impedance on the load side, the system achieves power control without requiring a DC-DC converter. The impedance adjustment acts as a mediator that enables power regulation through electrical parameter modification rather than voltage conversion.
2Adaptability or versatility
If a DC-DC converter is added to control the direct current output voltage, then the power control capability is improved, but the control responsiveness worsens
Solution Approach 1:
The patent removes the DC-DC converter which inherently slows down control response due to its voltage conversion process. By extracting the power control function and implementing it through load-side impedance adjustment, the system achieves faster control responsiveness since impedance changes can be made directly without intermediate voltage conversion steps.
Solution Approach 2:
The patent changes the control parameter from voltage (in DC-DC converter) to impedance (in load side). By controlling the equivalent impedance on the load side rather than converting voltage, the system achieves power control with improved responsiveness. The impedance parameter can be adjusted directly to achieve the desired power level without the delays associated with voltage conversion.
3Productivity
If the inverter circuit operates at high frequency, then the power delivery speed is improved, but the control difficulty increases
Solution Approach 1:
The patent introduces impedance adjustment as an intermediary control mechanism that simplifies high-frequency inverter control. By controlling the equivalent impedance on the load side, the system can regulate power delivery at high frequencies without directly controlling the inverter switching, thereby reducing control difficulty while maintaining high productivity.
Solution Approach 2:
The patent changes the control approach from direct inverter switching control to load-side impedance control. This parameter change allows the system to operate the inverter at high frequencies for improved power delivery speed while simplifying the control mechanism by adjusting impedance rather than directly managing high-frequency switching operations.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration simplifies the power supply device, reduces costs, and improves control responsiveness by stabilizing the power supply without the need for complex DC-DC converter voltage control, enabling efficient high frequency power delivery to plasma processing loads.
Implementation Method 1
a rectification smoothing circuit that converts a commercial alternating current voltage into a direct current voltage
Implementation Method 2
a rectification smoothing circuit that converts a commercial alternating current voltage into a direct current voltage and smoothes the same
Implementation Method 3
an inverter circuit that converts an output of the DC-DC converter into high frequency alternating current power
Implementation Method 4
The inverter circuit 3 alternately turns on the switch elements S1, S4, which configure a pair of one opposite sides of the H bridge, and the switch elements S2, S3
Implementation Method 5
The alternating current voltage and current having rectangular waveforms, which are output by the inverter circuit 3, are converted into the high frequency voltage and current of sinusoidal waveforms by the series resonance circuit 5 and a lowpass filter 6
Implementation Method 6
The alternating current voltage and current having rectangular waveforms, which are output by the inverter circuit 3, are converted into the high frequency voltage and current of sinusoidal waveforms by the series resonance circuit 5 and a lowpass filter 6
Implementation Method 7
an impedance adjuster that adjusts a load side impedance, which is an impedance of a load side circuit seen from an output terminal of the high frequency power generation unit, and an impedance control unit that controls the variable reactance element of the impedance adjuster
Implementation Method 8
an impedance adjuster that comprises a plurality of reactance elements including at least one variable reactance element and adjusts a load side impedance by changing a reactance value of the variable reactance element
Data Source
AI summary
There is provided a high frequency power supply device. The power control unit comprises an impedance adjuster that includes a variable reactance element and adjusts a load side impedance by changing a reactance value of the variable reactance element, and an impedance control unit that controls the variable reactance element of the impedance adjuster in response to a power value detected by a power detection unit so as to perform control of approximating the power value of the high frequency power, which is fed from the high frequency power generation unit to the load, to the setting value or control of maintaining the power value within the set allowable range by changing a resistance of the load side impedance in response to the power value detected by the power detection unit.