High-K Antifuse Memory Cell Reverse Bias Programming

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Solution Overview

Problem

Existing memory cell programming technologies using lower-K dielectric antifuses require high bias voltages, leading to potential diode damage and high power consumption due to increased current during programming, and suffer from leakage issues during read operations.

Innovation Solution

Incorporating a high-K dielectric material with a K greater than 3.9 in the antifuse, which allows for lower programming voltages and reduced current density at rupture, along with thickening the antifuse to minimize leakage, enabling safer and more efficient programming with reduced power consumption.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Power

If lower-K dielectric antifuses are used for programming, then the programming can be performed, but high bias voltages are required leading to increased current and power consumption

Engineering Contradiction:
Improvepower consumptionVSAvoiddiode damage risk
Core Design Contradiction:
PowerVSReliability

Solution Approach 1:

The patent changes the dielectric constant parameter of the antifuse material from lower-K to high-K (greater than 3.9). This parameter change enables the same programming function to be achieved at lower bias voltages, thereby reducing power consumption and eliminating diode damage risks associated with high voltage operation.

Inventive Principle:
Principle #35Parameter changes

2Reliability

If lower-K dielectric antifuses are used, then programming is enabled, but leakage occurs during read operations

Engineering Contradiction:
Improveread operation leakageVSAvoidantifuse thickness
Core Design Contradiction:
ReliabilityVSEase of manufacture

Solution Approach 1:

The patent utilizes the high-K dielectric material property to achieve lower leakage current during read operations. The high-K material provides better charge retention and reduces tunneling leakage compared to lower-K materials, improving read operation reliability without requiring excessive thickness increases.

Inventive Principle:
Principle #35Parameter changes

3Power

If high-K dielectric material with K greater than 3.9 is used in the antifuse, then lower programming voltages are achieved, but the dielectric layer must be thickened to minimize leakage

Engineering Contradiction:
Improveprogramming voltageVSAvoidantifuse thickness
Core Design Contradiction:
PowerVSLength of stationary object

Solution Approach 1:

The patent changes the dielectric constant parameter to high-K (greater than 3.9), which allows the antifuse to achieve the required electrical properties at optimized thicknesses. The high-K material provides superior charge storage capability per unit thickness, enabling lower programming voltages while maintaining acceptable leakage characteristics without excessive thickness increases.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The use of high-K dielectric antifuses in memory cells reduces the risk of diode damage and power consumption during programming, while minimizing leakage during read operations, facilitating lower-power, multiple bit/level programming and enabling the formation of three-dimensional memory arrays.

Implementation Method 1

The antifuse includes a high-K dielectric material with a K greater than 3.9... applying a programming pulse to a memory cell including a diode and an antifuse in comunication with the diode... reverse-biases the diode of the memory cell

Methodology Applied
Scientific EffectDielectric breakdown: Dielectric Permittivity

Data Source

PatentEP1899978B1Memory cell with high-k antifuse for reverse bias programming
Publication Date: 2010.12.01 SANDISK 3D LLC
  • EP1899978B1 patent drawingFigure 1
  • EP1899978B1 patent drawingFigure 2
  • EP1899978B1 patent drawingFigure 3

AI summary

An integrated circuit and associated method of programming are provided. Such integrated circuit includes a memory cell with a diode and an antifuse in communication with the diode. The antifuse is constructed to include a high-K dielectric material with a K greater than 3.9. Further, the memory cell is programmed utilizing a programming pulse that reverse biases the diode thereof.