High-k Dielectric Capacitor Charge Trapping Mitigation

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Solution Overview

Problem

High-k dielectric materials in capacitors used in memory devices are susceptible to charge trapping and polarization effects, leading to degradation over time and reduced ability to store charge of the opposite state, which affects data integrity and storage capacity.

Innovation Solution

Incorporating circuitry that occasionally inverts the data stored in high-k dielectric capacitors to reduce charge trapping and polarization effects, and tracking the initial state to ensure proper polarity during operations, thereby prolonging the lifetime of the capacitors and maintaining data integrity.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Quantity of substance

If high-k dielectric materials are used as capacitor dielectric film, then charge storage capacity is improved, but charge trapping and polarization effects worsen

Engineering Contradiction:
Improvecharge storage capacityVSAvoidcapacitor performance stability
Core Design Contradiction:
Quantity of substanceVSReliability

Solution Approach 1:

The patent applies periodic action by implementing refresh operations that periodically read and rewrite data stored in capacitors using high-k dielectric materials. This periodic refresh cycle prevents charge trapping and polarization effects from degrading capacitor performance over time, allowing the system to maintain both high charge storage capacity and reliable operation.

Inventive Principle:
Principle #19Periodic action

2Duration of action of moving object

If charge is stored on high-k dielectric capacitor for long periods, then data retention is improved, but transient effects and charge trapping increase

Engineering Contradiction:
Improvedata retention timeVSAvoidcharge trapping and polarization
Core Design Contradiction:
Duration of action of moving objectVSObject-generated harmful factors

Solution Approach 1:

The patent applies preliminary action by performing refresh operations before charge trapping and polarization effects significantly degrade capacitor performance. The system periodically reads and rewrites stored data, preemptively clearing trapped charges and realigning electric dipoles before they cause substantial harm, thus maintaining both long data retention and low transient effects.

Inventive Principle:
Principle #10Preliminary action

3Quantity of substance

If electric field is applied to high-k material for sufficient time, then charge storage capacity is improved, but electron tunneling into trapping states increases

Engineering Contradiction:
Improvecharge storage capacityVSAvoidcharge loss to trapping states
Core Design Contradiction:
Quantity of substanceVSLoss of energy

Solution Approach 1:

The patent applies periodic action by implementing refresh operations that periodically read and rewrite data stored in capacitors using high-k dielectric materials. This periodic refresh cycle prevents charge trapping and polarization effects from degrading capacitor performance over time, allowing the system to maintain both high charge storage capacity and reliable operation.

Inventive Principle:
Principle #19Periodic action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach effectively reduces adverse transient effects, prolongs the lifespan of high-k dielectric materials, and ensures data integrity by frequently inverting stored charge, thereby delaying dielectric breakdown and maintaining accurate data storage.

Implementation Method 1

High-k dielectric materials such as hafnium and zirconium silicates and oxides (e.g., HfSiON, HfO2, HfSiO, HfSiON, etc.) and other materials or stacks of materials (e.g. ZrO2/SiO2/ZrO2, ZrO2/Al2O3/ZrO2, etc.) having a relatively high dielectric permittivity can be used in place of SiO2 as the capacitor dielectric film.

Methodology Applied
Scientific EffectDielectric permittivity: Dielectric Permittivity

Implementation Method 2

Electric dipoles tend to align in high-k material when an external electric field is applied to the capacitor electrodes.

Methodology Applied
Scientific EffectPolarization: Polarisation

Implementation Method 3

When an electric field is applied for a sufficient time electrons tunnel from the capacitor electrodes into trapping states, creating charged states in the high-k dielectric material.

Methodology Applied
Scientific EffectElectron tunneling:

Data Source

PatentUS7894240B2Method and apparatus for reducing charge trapping in high-k dielectric material
Publication Date: 2011.02.22 INFINEON TECHNOLOGIES AG
  • US7894240B2 patent drawing
  • US7894240B2 patent drawing
  • US7894240B2 patent drawing

AI summary

In one embodiment, an integrated circuit includes a memory array having a plurality of capacitors for storing data of an initial state in the memory array in an initial state. The integrated circuit also includes circuitry for occasionally inverting the data stored by the plurality of capacitors and tracking whether the current state of the data stored by the plurality of capacitors corresponds to the initial state. The circuitry inverts the data read out of the memory array during a read operation when the current state of the data does not correspond to the initial state.