High-Pass X-Ray Filter with Supported Membrane

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Solution Overview

Problem

Existing X-ray transmission mirror optics face challenges in providing a stable support for a thin, reflecting membrane that does not block the transmitted beam, requiring a long beam footprint, minimal absorption, and a figured surface, while also suffering from low yield and inefficiency.

Innovation Solution

A high-pass x-ray filter device is developed using a silicon microfabrication process with a two-step etch method to create a robust frame that supports a thin-film membrane across an elongated opening in a substrate, allowing for efficient transmission of high-energy x-rays and reflection of low-energy x-rays without obstructing the beam.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Loss of energy

If a thin reflecting membrane is used to minimize absorption, then x-ray transmission efficiency is improved, but the membrane lacks mechanical stability and cannot support itself without blocking the beam

Engineering Contradiction:
Improvex-ray absorptionVSAvoidmembrane stability
Core Design Contradiction:
Loss of energyVSReliability

Solution Approach 1:

The patent employs a thin-film reflecting membrane that is sufficiently thin to minimize x-ray absorption while being mechanically supported by a frame structure. The membrane acts as a flexible reflective surface that maintains its optical function without requiring thick supporting material that would block the x-ray beam.

Inventive Principle:
Principle #30Flexible shells and thin films

Solution Approach 2:

A frame structure serves as an intermediary between the thin membrane and the beam path. The frame provides mechanical stability and support for the membrane while being positioned to not block the transmitted x-ray beam, allowing the membrane to maintain its reflective function without direct contact with support structures in the beam path.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Reliability

If a long beam footprint mirror is used to provide stable support, then mechanical stability is improved, but the device complexity and manufacturing difficulty increase

Engineering Contradiction:
Improveoptic stabilityVSAvoidstructure complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The support structure is segmented into a frame with discrete support points rather than a continuous solid structure. This segmentation allows the membrane to be supported at multiple locations along its length, providing stability while maintaining a compact footprint and simplifying manufacturing through modular construction.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The support problem is solved by transitioning from a two-dimensional planar support to a three-dimensional frame structure that supports the membrane from below. This dimensional change allows stability to be achieved through vertical support rather than requiring an extended horizontal footprint.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

3Strength

If a thick frame is used to support the membrane, then mechanical strength is improved, but the frame blocks the transmitted x-ray beam

Engineering Contradiction:
Improveframe strengthVSAvoidbeam blocking
Core Design Contradiction:
StrengthVSLoss of energy

Solution Approach 1:

The frame is constructed with thin-walled structures that provide sufficient mechanical strength to support the membrane while minimizing the material cross-section in the beam path. The thin walls are sufficient for structural support but do not significantly block the transmitted x-ray beam.

Inventive Principle:
Principle #30Flexible shells and thin films

Solution Approach 2:

The frame may utilize composite material structures that provide high strength-to-area ratio, allowing adequate mechanical support with minimal material in the beam path. Composite structures can achieve required strength with less material cross-section than solid homogeneous materials.

Inventive Principle:
Principle #40Composite materials

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution achieves a highly selective and efficient high-pass x-ray filter with a 90% yield, providing a sharper energy cut-off and minimizing absorption, suitable for use in synchrotrons and broadband optic setups.

Implementation Method 1

The reflecting membrane is configured to transmit, from an incident x-ray beam, x-ray photons having an energy above about a threshold energy level and reflects, from the incident x-ray beam, x-ray photons having an energy below about the threshold energy level

Methodology Applied
Scientific EffectTotal external reflection: Reflection

Data Source

PatentUS11333620B2High-pass x-ray filter device and methods of making thereof
Publication Date: 2022.05.17 CORNELL UNIVERSITY
  • US11333620B2 patent drawing
  • US11333620B2 patent drawing
  • US11333620B2 patent drawing

AI summary

A high-pass x-ray filter device is disclosed that includes a substrate defining an elongated opening. A reflecting membrane is positioned across the opening and supported, along all sides, by the substrate. The reflecting membrane is configured to transmit, from an incident x-ray beam, x-ray photons having an energy above about a threshold energy level and reflects, from the incident x-ray beam, x-ray photons having an energy below about the threshold energy level. The elongated opening of the substrate defines an exit path for the transmitted x-ray beam. A high-pass x-ray filter system including the high-pass filter device and a method of fabrication of the high-pass filter device are also disclosed.