High-Q Cavity Resonant Filter for mm Wave Applications

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Solution Overview

Problem

Existing gas sensors face challenges with contamination, false readings, low sensitivity, and low specificity, particularly in distinguishing between harmful and benign gases, and current mm wave RF filter technologies are costly and complex for mobile device applications at higher frequencies.

Innovation Solution

A photolithographically fabricated high-Q cavity resonant structure that can be manufactured inexpensively with tight tolerances, allowing for compact, sensitive, and robust gas sensing devices and mobile device filters, using a solid-state mm wave source coupled into a high-Q cavity resonant structure without acoustic conversion, enabling efficient signal processing and power reduction.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Volume of moving object

If SAW and BAW filters are used for mm wave frequencies, then the device can be miniaturized to fit mobile handsets, but the manufacturing cost and complexity increase significantly

Engineering Contradiction:
Improvefilter sizeVSAvoidmanufacturing cost
Core Design Contradiction:
Volume of moving objectVSEase of manufacture

Solution Approach 1:

The patent replaces the mechanical acoustic wave conversion process (SAW/BAW) with a direct electromagnetic resonant cavity system. The resonant cavity operates natively at mm wave frequencies without requiring piezoelectric material conversion, thereby eliminating the complex lithographic fabrication processes while maintaining miniaturization through resonant frequency scaling.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent changes the operating parameters by using resonant cavities tuned to specific mm wave frequencies rather than relying on acoustic wave frequencies. This parameter change allows the use of simpler fabrication techniques while achieving the same size reduction through resonant frequency scaling rather than acoustic wavelength scaling.

Inventive Principle:
Principle #35Parameter changes

2Measurement precision

If chemical receptor systems are used for gas sensing, then sensitivity to specific gases is improved, but contamination and false readings increase

Engineering Contradiction:
Improvegas detection sensitivityVSAvoidreading accuracy
Core Design Contradiction:
Measurement precisionVSReliability

Solution Approach 1:

The patent employs a tunable resonant frequency system that can dynamically adjust its detection frequency to match specific molecular absorption lines. This dynamic tuning capability allows the system to selectively detect different gases by matching their unique spectral fingerprints, providing both high sensitivity and high reliability without contamination issues.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The patent applies the principle of local quality by targeting specific frequency bands that correspond to absorption lines of particular gas molecules. Rather than using a broad-spectrum chemical receptor, the system focuses its detection energy on specific local frequency regions where target gases exhibit characteristic absorption, thereby achieving selective detection with high precision and reliability.

Inventive Principle:
Principle #3Local quality

3Measurement precision

If absorption spectroscopy using mm wave RF radiation is used for gas sensing, then the ability to detect contaminant gases is improved, but the device size and complexity increase

Engineering Contradiction:
Improvegas detection capabilityVSAvoidstructure size
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent implements a nested structure where the resonant cavity is integrated within a compact housing that contains both the mm wave source and detector. This nested arrangement allows the entire gas sensing system to be miniaturized while maintaining the absorption spectroscopy functionality, as the electromagnetic field is confined within the nested cavity structure rather than requiring external bulky components.

Inventive Principle:
Principle #7Nested doll (Nesting)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution provides a cost-effective, highly sensitive, and robust gas sensing and mobile device filtering solution with superior signal-to-noise ratio, suitable for challenging environments and tight spaces, while reducing manufacturing costs and complexity.

Implementation Method 1

a high-Q cavity resonant structure, wherein the resonant structure has at least one cavity formed in a semiconductor substrate

Methodology Applied
Scientific EffectResonance: Resonance

Implementation Method 2

Mm wave RF radiation, in theory could be used to probe molecular energy levels of contaminant gases, and so could be used to detect their presence

Methodology Applied
Scientific EffectAbsorption (EM radiation): Absorption (EM radiation)

Data Source

PatentUS11309837B2Resonant filter using mm wave cavity
Publication Date: 2022.04.19 ATOMICA CORP
  • US11309837B2 patent drawing
  • US11309837B2 patent drawing
  • US11309837B2 patent drawing

AI summary

Systems and methods for forming a mm wave resonant filter include a lithographically fabricated high Q resonant structure. The resonant structure may include a plurality of cavities, each cavity having a characteristic frequency that defines its passband. A filter may include a plurality of resonant structures, and each resonant structure may include a plurality of cavities. These cavities and filters may be fabricated lithographically.