High Voltage Power Supply Impedance Loop Circuit Ripple Reduction
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
High-voltage power supplies for charged particle beam apparatuses face challenges in reducing ripple and achieving accurate detection of load and discharge currents due to electromagnetic noise from adjacent power supply circuits, which degrades detection accuracy.
Innovation Solution
The implementation of an impedance loop circuit configured by connecting multiple impedance elements in a loop shape, grounding points for the boost, shield, and filter circuits, and using a capacitative element to stabilize voltage detection, effectively reduces ripple and enhances current detection accuracy.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If multiple voltage source circuits are adjacently disposed to generate various high voltages, then the functionality and versatility of the power supply is improved, but electromagnetic noise from one circuit is applied to other circuits, increasing ripple and degrading detection accuracy
Solution Approach 1:
The patent divides the power supply system into multiple independent voltage source circuits, each with its own shielding and grounding structure. By segmenting the circuits and providing individual electromagnetic shielding for each, the noise from one circuit is isolated from others, allowing multiple circuits to operate adjacently without mutual interference.
Solution Approach 2:
The patent introduces shielding structures as intermediary elements between adjacent voltage source circuits. These shields act as mediators that block electromagnetic noise propagation from one circuit to another, enabling the circuits to be disposed adjacently while maintaining detection accuracy.
2Manufacturing precision
If the amount of ripple is reduced to achieve higher resolution (from 10 ppm to 3 ppm), then the measurement image resolution is improved, but the requirement for reducing electromagnetic noise interference becomes more stringent and complex
Solution Approach 1:
The patent employs multiple grounding points connected by grounding conductors to create equipotential regions throughout the power supply device. This equipotential grounding system stabilizes the reference potential across all voltage source circuits, reducing ripple and enabling high-resolution measurements while maintaining a manageable device structure.
Solution Approach 2:
The patent introduces shielding structures as intermediary elements between adjacent voltage source circuits. These shields act as mediators that block electromagnetic noise propagation from one circuit to another, enabling the circuits to be disposed adjacently while maintaining detection accuracy.
3Volume of moving object
If voltage source circuits are disposed adjacently to reduce device size, then the compactness is improved, but electromagnetic noise increases ripple and becomes a disturbance factor that degrades detection accuracy
Solution Approach 1:
The patent divides the power supply system into multiple independent voltage source circuits, each with its own shielding and grounding structure. By segmenting the circuits and providing individual electromagnetic shielding for each, the noise from one circuit is isolated from others, allowing multiple circuits to operate adjacently without mutual interference.
Solution Approach 2:
The patent introduces shielding structures as intermediary elements between adjacent voltage source circuits. These shields act as mediators that block electromagnetic noise propagation from one circuit to another, enabling the circuits to be disposed adjacently while maintaining detection accuracy.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration significantly reduces ripple and enables high-accuracy detection of load and discharge currents, even in the presence of electromagnetic noise, thereby improving the resolution of measurement images in charged particle beam apparatuses.
Implementation Method 1
a shield that covers the transformer and the boost circuit
Implementation Method 2
a transformer that boosts an output voltage of the drive circuit
Implementation Method 3
using a capacitative element to stabilize voltage detection
Implementation Method 4
a filter circuit that filters, smoothes, and outputs a high voltage output from the boost circuit
Data Source
AI summary
Even in a case where a disturbance is applied from an adjacently disposed power supply circuit or the like, in order to realize a reduction in ripple, a high-voltage power supply device is configured to include a drive circuit, a transformer that boosts an output voltage of the drive circuit, a boost circuit that further boosts a voltage boosted by the transformer, a shield that covers the transformer and the boost circuit, a filter circuit that filters, smoothes, and outputs a high voltage output from the boost circuit, and an impedance loop circuit configured by connection of a plurality of impedance elements into a loop shape. A grounding point of the boost circuit, a grounding point of the shield, and a grounding point of the filter circuit are configured to be grounded via the impedance loop circuit, and this is applied to a high-voltage power supply unit that applies a high voltage to an electron gun of a charged particle beam apparatus.