3D HIM-SIMS Imaging With Topography-Corrected Chemical Mapping
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Solution Overview
Problem
Conventional 3D reconstruction of SIMS data assumes a flat surface and uniform sputtering conditions, which is not applicable to samples with complex topography, leading to challenges in chemical or elemental analysis of micro- and nanosized particles and patterned materials.
Innovation Solution
A method combining secondary electron detection and secondary ion mass spectrometry for in-situ 3D imaging and chemical analysis, using photogrammetric reconstruction to account for sample topography within a single instrument, such as a Helium Ion Microscope, without the need for ex-situ analysis or additional instrumentation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If conventional 3D reconstruction techniques are used to stack 2D SIMS images with arbitrary thickness, then the reconstruction process is simple, but the accuracy of chemical analysis deteriorates for samples with complex topography
Solution Approach 1:
The patent performs 3D surface reconstruction using AFM data before conducting SIMS analysis. This preliminary topographical mapping allows the SIMS reconstruction process to account for actual surface geometry rather than assuming a flat surface, thereby improving chemical analysis accuracy while maintaining procedural simplicity
Solution Approach 2:
The patent introduces AFM topographical data as an intermediary element that bridges the gap between simple 3D reconstruction and accurate chemical analysis. The AFM z-information serves as a mediator that corrects the reconstruction model to reflect actual surface topology, enabling accurate SIMS data interpretation without complex iterative procedures
2Measurement precision
If AFM is used for ex-situ topography analysis, then topographical information is obtained, but sample contamination increases and flexibility is limited
Solution Approach 1:
The patent merges AFM topography measurement and SIMS chemical analysis into a single in-situ measurement process. The AFM and SIMS instruments are integrated, allowing sequential or simultaneous operation where the AFM measures surface topography and the SIMS analyzes chemical composition without removing the sample from the vacuum environment, thereby preventing contamination
Solution Approach 2:
The patent creates a multi-functional instrument that performs both AFM topography measurement and SIMS chemical analysis within a single device. This universal instrument eliminates the need for separate ex-situ AFM measurements, maintaining sample integrity while providing comprehensive characterization capabilities
3Measurement precision
If multiple separate instruments are used for topography and chemical analysis, then each measurement can be optimized, but device complexity and operational difficulty increase
Solution Approach 1:
The patent combines AFM and SIMS instruments into a single integrated device, merging topography measurement and chemical analysis capabilities. This unified instrument maintains the measurement precision of both techniques while eliminating the complexity of operating multiple separate instruments and coordinating measurements across different devices
Solution Approach 2:
The patent creates a universal instrument that performs multiple functions: AFM-based topography measurement, SIMS-based chemical analysis, and integrated 3D reconstruction. This multi-functional device replaces what would traditionally require separate specialized instruments, simplifying the overall measurement system while maintaining optimization of each measurement modality
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables accurate 3D reconstruction of complex samples by incorporating topographical information, reducing sample damage and enhancing analytical precision by correlating HIM-SIMS microscopy, allowing for advanced analysis and machining.
Implementation Method 1
a secondary electron detector configured to detect secondary electrons emitted from the sample surface when illuminated by the electron beam
Implementation Method 2
a focused primary electron beam is used to illuminate the surface of a sample. Thereby, secondary electrons are emitted from the sample
Implementation Method 3
a focused primary ion beam is used to illuminate the surface of a sample. Thereby, material is sputtered from the sample, which creates localised secondary ion emissions stemming from the sample
Data Source
AI summary
A method for in-situ joint nanoscale three-dimensional imaging and chemical analysis of a sample. A single charged particle beam device is used for generating a sequence of two-dimensional nanoscale images of the sample, and for sputtering secondary ions from the sample, which are analysed using a secondary ion mass spectrometry device. The two-dimensional images are combined into a three-dimensional volume representation of the sample, the data of which is combined with the results of the chemical analysis.