Hinged MEMS Device Minimizing Energy Loss via Segmented Blades
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Solution Overview
Problem
Existing hinged microelectromechanical and nanoelectromechanical devices with out-of-plane movement face challenges in achieving high conversion efficiency due to energy losses in the hinge and sensing elements, as modifying the dimensions of torsionally-stressed blades to optimize angular and compression stiffness results in compromises that increase energy loss.
Innovation Solution
A hinged device design featuring a first part and a second part capable of out-of-plane rotational movement, with a hinging element and a sensing element arranged in separate planes, where the hinging element has low angular stiffness and high compression stiffness, and the second part has a large dimension orthogonal to the planes, minimizing energy loss by ensuring the hinge compresses the sensing element rather than the hinge itself.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Loss of energy
If the width of the torsionally-stressed blades is decreased and/or the length is increased to reduce angular stiffness, then the energy lost during hinge deformation decreases, but the compression stiffness decreases
Solution Approach 1:
The hinge system is divided into two functionally independent components: torsionally-stressed blades for angular movement and compression-stressed blades for compression support. This segmentation allows each component to be optimized for its specific function without compromising the other, resolving the contradiction between reducing angular stiffness and maintaining compression stiffness.
Solution Approach 2:
Different regions of the hinge system are assigned different mechanical properties: the torsionally-stressed blades are designed with low angular stiffness (through decreased width and/or increased length) while the compression-stressed blades are designed with high compression stiffness. This local differentiation of mechanical properties allows simultaneous optimization of both energy loss and compression support.
2Strength
If the width of the torsionally-stressed blades is increased to increase compression stiffness, then the resistance to compression increases, but the energy lost during blade deformation increases
Solution Approach 1:
The hinge system separates compression function and torsional function into distinct blade components. Compression-stressed blades handle compressive loads while torsionally-stressed blades handle rotational movement, eliminating the trade-off where increasing width for compression stiffness would increase torsional energy loss.
Solution Approach 2:
The two blade types have asymmetric geometric configurations optimized for their respective functions: compression blades are designed with dimensions optimized for compressive strength, while torsional blades are designed with dimensions optimized for low angular stiffness. This asymmetric design allows each component to excel at its specific function without being constrained by the requirements of the other.
3Loss of energy
If the length of the torsionally-stressed blades is increased to reduce angular stiffness, then the energy lost during hinge deformation decreases, but the compression stiffness decreases
Solution Approach 1:
The hinge system divides functionality between separate blade components, allowing the torsionally-stressed blades to be lengthened for reduced angular stiffness without compromising overall compression stiffness, as this is handled by the compression-stressed blades.
Solution Approach 2:
The hinge system as a whole provides both torsional flexibility and compression support through its multi-component design. While individual torsional blades are optimized for one function, the complete hinge system delivers both required functions through the combined action of different blade types.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design enhances the conversion efficiency by minimizing energy loss during deformation, allowing for effective detection and measurement of out-of-plane movements while maintaining high signal amplification and reducing the influence of torsional stiffness on rotational movement.
Implementation Method 1
at least one blade extending perpendicularly to the first plane and to the second plane and parallel to the axis of rotation, said at least one blade connecting the first part and the second part, the blade being intended to undergo at least torsional deformation during the rotational movement of the second part relative to the first part
Data Source
AI summary
Disclosed is a hinged MEMS and/or NEMS device with out-of-plane movement including a first portion and a second portion that is hinged so as to be able to rotate with respect to the first portion about an axis of rotation contained in a first mean plane of the device. The device also includes a hinging element that connects the first portion and the second portion and that is stressed flexurally and a sensing element that extends between the first portion and the second portion and that deforms during the movement of the second portion. Finally, the device includes two blades that extend perpendicularly to the mean plane of the hinge device and parallel to the axis of rotation, the blades being placed between the hinging element and the sensing element and connecting the first portion and the second portion and being stressed torsionally during the movement of the second portion.