High Organic Group Content Periodic Mesoporous Organosilicas for Microelectronics
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Solution Overview
Problem
Conventional periodic mesoporous silicas and organosilicas have limited mechanical stability and are humidity-sensitive due to their low organic group content, which restricts their applications in microelectronics and other fields where high organic group content is desirable for improved dielectric and mechanical properties.
Innovation Solution
The development of high organic group content periodic mesoporous organosilicas (HO-PMOs) using interconnected cyclic [SiR]n rings with multiple organic bridging groups, allowing for increased organic group content and improved structural stability through template-directed self-assembly and lithiation reactions.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If terminal organic groups like CH3 are incorporated into meso-silica networks, then dielectric constant is decreased and moisture sensitivity is reduced, but mechanical stability is reduced
Solution Approach 1:
The patent creates a composite material system where cyclic organosilane building blocks with integrated organic groups form a hybrid organic-inorganic framework. This composite structure allows the organic groups to be part of the load-bearing framework rather than terminal attachments, simultaneously providing dielectric benefits and maintaining mechanical stability through the cyclic ring structure.
Solution Approach 2:
The patent changes the structural parameter of organic group integration from terminal attachment to bridging incorporation within cyclic structures. This parameter change allows the organic groups to contribute to both dielectric properties and mechanical strength by being structurally integrated into the framework rather than being peripheral modifications.
2Reliability
If the number of organic groups in PMO is increased, then improved materials properties are achieved, but mechanical stability is reduced
Solution Approach 1:
The patent segments the organic-inorganic framework into discrete cyclic [SiR]n building blocks that are interconnected through inorganic atoms. This segmentation allows each cyclic unit to maintain its structural integrity and mechanical contribution while incorporating multiple organic groups, resolving the contradiction between high organic content and mechanical stability.
Solution Approach 2:
The patent employs a composite architecture where cyclic organosilane units with multiple organic groups are linked through inorganic bridges to form a robust hybrid framework. This composite structure enables high organic group content while maintaining mechanical stability through the distributed cyclic building blocks.
3Quantity of substance
If cyclic [SiR]n rings with multiple organic bridging groups are used, then organic group content is increased, but structural complexity is increased
Solution Approach 1:
The cyclic [SiR]n building blocks serve multiple functions simultaneously: they provide structural framework elements, incorporate multiple organic groups for high organic content, and offer controlled porosity through their cyclic geometry. This multi-functionality increases organic group content without proportionally increasing structural complexity.
Solution Approach 2:
The patent changes the topological parameter of the framework from linear or discrete connections to cyclic ring structures. This topological change efficiently packs multiple organic groups within a compact cyclic unit, increasing organic content while maintaining relatively simple structural organization through repetition of the cyclic motif.
Data Source
AI summary
The present invention provides a new class of organic/inorganic hybrid materials having [ER]n rings interconnected by E′ atoms. In an embodiment a class of materials called high organic group content periodic mesoporous organosilicas (HO-PMO's) with [SiR]3 rings interconnected by O atoms is described. The measured dielectric, mechanical and thermal properties of the materials suggest that an increased organic content achieved by the [SiR]3 rings of a high organic group content periodic mesoporous organosilica leads to superior materials properties potentially useful for a wide range of applications including microelectronics, separation, catalysis, sensing, optics or electronic printing.