Rotatable Holder Temperature Sensing by Fluorescence in Vacuum
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Solution Overview
Problem
Existing substrate processing apparatuses face challenges in accurately detecting the temperature of a rotatable holder, particularly in ultra-high vacuum and extremely low temperature environments, making it difficult to monitor and control the thermal conditions effectively.
Innovation Solution
A method involving the use of fluorescent bodies mounted on the holder, which emit fluorescence upon irradiation with a specific wavelength, allowing non-contact temperature estimation based on fluorescence intensity attenuation, coupled with optical detection and processing units to determine the holder's temperature.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If conventional temperature detection methods are used in ultra-high vacuum and extremely low temperature environments, then the detection system becomes complex and unreliable, but temperature monitoring capability is insufficient
Solution Approach 1:
The patent replaces conventional mechanical contact-based temperature sensors with a fluorescent-based optical detection system. The fluorescent body emits light whose characteristics change with temperature, allowing non-contact temperature measurement that eliminates the complexity and reliability issues of mechanical sensors in ultra-high vacuum and cryogenic environments
Solution Approach 2:
The patent utilizes the temperature-dependent optical parameters of fluorescent materials. By measuring changes in fluorescence intensity, wavelength, or lifetime as parameters change with temperature, the system achieves accurate temperature detection without complex mechanical sensing components
2Reliability
If contact-based temperature sensors are used on the rotatable holder, then the holder structure becomes more complex, but temperature monitoring is achieved
Solution Approach 1:
The patent replaces mechanical contact sensors with a fluorescent body that can be integrated into the holder structure without adding mechanical complexity. The fluorescent material responds to temperature changes optically, providing reliable monitoring while maintaining structural simplicity
Solution Approach 2:
The patent uses the fluorescent body as an optical copy or indicator of temperature conditions. Instead of directly measuring temperature with complex sensors, the fluorescent material provides an optical signal that replicates temperature information, simplifying the overall system
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables precise temperature detection of the rotatable holder even at extremely low temperatures, enhancing monitoring and control of thermal conditions, and improving film formation processes by ensuring optimal thermal conductivity and positioning with substrate.
Implementation Method 1
a step of irradiating a fluorescent body thermally mounted on the holder with a light pulse having a first wavelength; a step of detecting fluorescence having a second wavelength emitted from the fluorescent body due to the light pulse
Data Source
AI summary
A holder temperature detection method which measures a temperature of a rotatable holder that holds a substrate is provided. The method comprises a step of irradiating a fluorescent body thermally mounted on the holder with a light pulse having a first wavelength, a step of detecting fluorescence having a second wavelength emitted from the fluorescent body due to the light pulse and a step of estimating the temperature of the holder based on the detected fluorescence.