Rotating Workpiece Holder Structure for Peripheral Backside Cleaning
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing cleaning apparatuses face structural constraints and design challenges due to limited space, leading to dirt adherence on the side of the workpiece held by the holder table, particularly in the peripheral area, which conventional nozzles located below the holder surface fail to address effectively.
Innovation Solution
A cleaning apparatus with a first holder surface smaller than the workpiece, a rotation device, and a protruding portion that guides cleaning fluid to clean the outer periphery of the workpiece, allowing for effective cleaning of both the front and back surfaces without additional nozzles or structural complexity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Area of stationary object
If a nozzle is located below the holder surface to clean the back surface of the workpiece, then cleaning coverage is improved, but device complexity and space requirements increase
Solution Approach 1:
The holder surface is designed to protrude in the vertical dimension, creating a stepped structure that allows the nozzle to access the back surface of the workpiece from above rather than requiring a below-surface location. This dimensional change enables comprehensive cleaning coverage while maintaining a simpler overall device structure.
Solution Approach 2:
The holder surface is segmented into different levels: a first holder surface for the front surface and a protruding portion creating a second level for the back surface. This segmentation allows the single holder structure to serve multiple cleaning functions without requiring additional nozzles or complex mechanisms.
2Volume of moving object
If the holder surface is made smaller to accommodate space constraints, then device compactness is improved, but cleaning effectiveness deteriorates due to dirt adherence on held surfaces
Solution Approach 1:
By adding vertical protrusion to the holder surface, the design creates additional cleaning access points without increasing the horizontal footprint of the device. This allows comprehensive cleaning of both front and back surfaces while maintaining a compact device volume.
Solution Approach 2:
The protruding portion of the holder surface acts as an intermediary structure that facilitates cleaning fluid access to the back surface of the workpiece. This intermediary element enables effective dirt removal from previously inaccessible areas without requiring larger device dimensions.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables thorough cleaning of both the front and back surfaces of the workpiece, effectively removing dirt and protective layer residues, while maintaining a compact design and avoiding structural complications.
Implementation Method 1
a rotation device configured to support and rotate the first holder surface
Implementation Method 2
a nozzle configured to supply cleaning fluid toward the protruding portion. The protruding portion is configured to guide the cleaning fluid supplied from the nozzle to enter a gap between the protruding portion and the first surface of the workpiece
Data Source
AI summary
A cleaning apparatus comprises a first holder surface which is for holding a first surface of a workpiece and is smaller than the workpiece, a rotation device configured to support and rotate the first holder surface, a protruding portion which is located closer than the first holder surface to the rotation device and protrudes outward with respect to the first holder surface, and a nozzle configured to supply cleaning fluid toward the protruding portion. The protruding portion is configured to guide the cleaning fluid supplied from the nozzle to enter a gap between the protruding portion and the first surface of the workpiece exposed off the first holder surface to clean an outer periphery of the first surface of the workpiece.