Holding Device Thermocouple Guide Section Design
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Solution Overview
Problem
Conventional holding devices for semiconductor wafers face instability in temperature measurement due to thermocouple expansion and contraction with heat, leading to unreliable readings.
Innovation Solution
A holding device featuring a ceramic sintered body base member with a hole structure that includes a sheathed thermocouple, where the thermocouple's end portion contacts the far end section and its intermediate portion contacts the inner wall of an intermediate guide section, stabilizing the measurement by reducing thermal distribution and allowing for smoother insertion and manufacturing.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a thermocouple is inserted in a hole of the base member, then temperature measurement is enabled, but the thermocouple expands or contracts due to heat causing unstable measurements
Solution Approach 1:
The hole is designed with multiple sections having different directions (first direction for first guide section, second direction for second guide section) to accommodate thermocouple expansion and contraction while maintaining stable contact at the measurement point
Solution Approach 2:
The intermediate guide section acts as a mediator between the first and second guide sections, providing a transition zone that allows the thermocouple to expand and contract without losing stable contact at the far end section
2Ease of manufacture
If the hole extends straight from the lower face, then manufacturing is simple, but the thermocouple cannot accommodate thermal expansion and contraction
Solution Approach 1:
The hole is segmented into multiple guide sections (first guide section, intermediate guide section, second guide section) with different extending directions, allowing the structure to accommodate thermocouple thermal expansion while maintaining manufacturability through modular design
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration ensures stable temperature measurement by preventing thermocouple instability and allowing for precise temperature monitoring, while also simplifying the device's manufacturing process.
Implementation Method 1
a sheathed thermocouple having a thermocouple contained in a sheath is disposed in the hole
Implementation Method 2
the holding device is required to allow a temperature to be stably measured by the front end portion of the thermocouple being in contact with an inner surface of a far end section of the hole if the thermocouple expands or contracts due to heat
Data Source
AI summary
A holding device includes: a plate-shaped base member defining a hole whose opening is formed at the lower face and extending toward an outer edge of the base member. A sheathed thermocouple is disposed in the hole. The hole has a first guide section that extends in a first direction, and a second guide section that extends in a second direction different from the first direction, through an intermediate guide section continuous with the first guide section, to a far end section of the hole, the sheathed thermocouple has an intermediate portion whose outer side surface is disposed closer to the opening with respect to the far end section of the hole. The outer side surface is in contact with an inner wall surface of the intermediate guide section. An end portion of the sheathed thermocouple is in contact with the far end section of the hole.