Holding Tray With Elastic Press Members For Substrate Alignment
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Solution Overview
Problem
Current substrate holding systems for vacuum deposition processes face challenges in achieving high-precision alignment and stable deposition due to limitations in substrate support and alignment mechanisms, leading to inaccuracies and potential damage during the deposition process.
Innovation Solution
A holding tray system with elastic holding means, including projections and grooves, and alignment mechanisms such as reference pins and adjustment holes, that securely anchor and align substrates on a frame, allowing for precise positioning and stable support during vacuum deposition.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If conventional substrate holding systems are used, then the substrate can be held during deposition, but high-precision alignment cannot be achieved
Solution Approach 1:
The holding system is divided into separate functional modules: the frame provides structural support, the tray receives and positions the substrate, and the holding means (press members with projections) secures the substrate. This segmentation allows each component to be optimized for its specific function, particularly enabling the frame to incorporate precise alignment features like reference pins and adjustment holes while the holding means focuses on secure attachment.
Solution Approach 2:
The alignment mechanism utilizes the substrate's own edges and surfaces as reference points. The reference pins engage with the substrate edges, and the adjustment holes allow the substrate to be self-aligned through its geometric features. This eliminates the need for external alignment equipment and enables high-precision alignment through the substrate's inherent geometry working in conjunction with the frame's reference features.
2Reliability
If conventional substrate support methods are used, then substrate can be held, but stable deposition process cannot be conducted
Solution Approach 1:
The holding means applies localized pressure at specific points on the substrate through the press members and projections. Rather than distributing force uniformly or requiring complex clamping mechanisms, the system uses strategically positioned press members that contact the substrate at key locations. This localized holding provides stable support during deposition while maintaining ease of operation, as the substrate can be simply placed into the tray and secured by the automated press members.
3Ease of operation
If substrate is held with simple means, then ease of operation is maintained, but misalignment and damage occur
Solution Approach 1:
The frame is pre-equipped with reference pins and adjustment holes positioned at precise locations before substrate loading. The tray is designed with predetermined positioning features that guide the substrate into the correct orientation. When the substrate is loaded, these pre-positioned features automatically establish accurate alignment without requiring complex adjustment procedures during operation. The press members are also pre-positioned to apply holding force at optimal locations.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system enables high-precision alignment and stable deposition by ensuring accurate substrate positioning and secure support, reducing the likelihood of misalignment and damage, thereby improving the quality of the deposited thin films.
Implementation Method 1
The press member includes a projection for insertion in its end so that it can be elastically held with the frame by means of the elastic means
Data Source
AI summary
Disclosed are a holding tray, a substrate alignment system using the same and a method thereof. More specifically, the present invention relates to a holding tray for substrate capable of accomplishing high-precision alignment and conducting a stable deposition. A holding means is included in at least one side of the substrate to hold and support the substrate in a manner that the substrate is vertically held and supported on a flat surface of the holding tray during a vacuum process.The holding tray according to the present invention, the substrate alignment system using the same, and the method thereof include a substrate on which a deposition is made, a frame formed to receive the substrate, a tray formed to receive the frame, and at least one holding means formed to hold the substrate on the frame.The holding tray for substrate according to the present invention, the substrate alignment system using the same, and the method thereof are useful to accomplish high-precision alignment and conduct a stable deposition process due to the stable vertical arrangement of the substrate during the deposition process.