Carrying Container Holding Unit for Substrate Processing Seal
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
In substrate processing apparatuses, a gap often occurs between the partition wall and the carrying container during loading/unloading of wafers, leading to atmospheric contamination from the carry-in area into the transfer area, due to the pressure difference and structural limitations.
Innovation Solution
The apparatus incorporates a carrying container holding unit with a roller unit and an elastic plate-shaped body that inserts obliquely into a recess on the carrying container to press it against the partition wall, ensuring a secure seal and preventing gaps, even when larger wafers are used.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a carrying container is pressed against a partition wall using a conventional pushing unit, then the container can be positioned for loading/unloading, but gaps occur between the container and partition wall due to pressure difference and structural limitations
Solution Approach 1:
The pressing mechanism is divided into two independent units: a carrying container pressing unit that applies primary pressing force, and a carrying container holding unit that provides additional stabilization. This segmentation allows each unit to perform its specific function effectively, preventing gaps without requiring an overly complex single mechanism.
Solution Approach 2:
A pressing member is introduced as an intermediary component between the pushing unit and the carrying container. This pressing member transmits and distributes the pressing force more effectively, ensuring uniform contact between the container and partition wall, thereby preventing gaps while maintaining mechanism simplicity.
2Ease of manufacture
If the carrying container structure is simplified for ease of manufacture, then production cost decreases, but the container cannot maintain proper contact with the partition wall under pressure difference
Solution Approach 1:
The holding unit is designed to be movable rather than fixed, allowing it to adapt its position and pressing force based on the specific carrying container being used. This dynamic design maintains reliable contact under pressure difference while keeping the container structure itself simple and easy to manufacture.
Solution Approach 2:
The pressing force and position parameters are made adjustable through the movable holding unit, allowing optimization of contact conditions for different container sizes and shapes. This enables simple container designs to achieve reliable sealing through parameter adjustment rather than complex structural features.
3Reliability
If a dual-unit pressing and holding mechanism is implemented, then gap occurrence is suppressed, but the device complexity increases
Solution Approach 1:
The pressing member is integrated into the existing pushing unit structure, combining the functions of pressing and holding in a unified mechanical arrangement. This merging reduces the need for completely separate mechanisms, thereby suppressing gap occurrence while minimizing the increase in overall device complexity.
Solution Approach 2:
The holding unit is designed with universal applicability to work with different carrying container types and sizes. This multi-functional design allows a single holding unit structure to serve multiple purposes, reducing the need for multiple specialized components and thereby limiting the increase in device complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration effectively suppresses the occurrence of gaps between the partition wall and the carrying container, maintaining the integrity of the transfer area's atmosphere and ensuring reliable processing conditions.
Implementation Method 1
an elastic plate-shaped body that inserts obliquely into a recess on the carrying container to press it against the partition wall
Data Source
AI summary
Provided is a substrate processing apparatus including: a carry-in area where a placing table is provided to place thereon a carrying container including a take-out opening, a flange formed on an upper portion of a side formed with the take-out opening, and a recess formed on a top surface of the flange; a transfer area maintained under an atmosphere different from that of the carry-in area; a partition wall configured to partition the carry-in area and the transfer area and formed with an opening; a door configured to open/close the opening; a carrying container pressing unit configured to press the carrying container placed on the placing table against the partition wall so that the take-out opening of the carrying container faces the opening of the partition wall; and a carrying container holding unit configured to be inserted into the recess to press the carrying container against the partition wall.