Hollow Cathode Sputtering Target Packaging via Cover Venting
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Conventional packaging methods for hollow cathode sputtering targets are inadequate in preventing dust, dirt, and oxidation due to insufficient vacuum suction and risk of resin bag bursting, especially in the voids of the target.
Innovation Solution
A packaging device and method that includes a cover with through-holes to facilitate vacuum suction within the resin bag, using a transparent, rigid cover and an impermeable resin bag to ensure complete evacuation and prevent oxidation, maintaining the target's cleanliness without contact with packaging resin.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If vacuum suction is applied to a hollow cathode sputtering target without a cover, then the resin bag can be sealed, but the void inside the target cannot be sufficiently evacuated and the bag may burst due to tension
Solution Approach 1:
A cover is introduced as an intermediary component between the target and the resin bag. The cover has through-holes that allow vacuum suction to reach the void inside the target, enabling effective evacuation without requiring the resin bag to be directly sealed against the target. This mediator resolves the contradiction by facilitating vacuum access while preventing bag bursting.
2Device complexity
If the resin bag is sealed directly around the target edge, then the structure is simple, but the void cannot be sufficiently evacuated and oxidization prevention is insufficient
Solution Approach 1:
The packaging system is segmented into three distinct components: the target, the cover with through-holes, and the resin bag. This segmentation allows the cover to specifically address the vacuum evacuation function while the resin bag provides the sealing and protection function, thereby improving oxidization prevention without excessive complexity.
3Manufacturing precision
If the resin bag is decompressed during vacuum suction, then vacuum is achieved, but the bag is pulled inward and tension causes the bag to burst
Solution Approach 1:
The cover acts as a structural cushioning element that distributes the vacuum-induced tension forces. By providing a rigid or semi-rigid barrier between the vacuum source and the resin bag, the cover prevents the bag from being directly pulled inward, thereby preventing bursting while still allowing vacuum evacuation through the through-holes.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Effectively evacuates the hollow portion of the target, preventing dust, dirt, and oxidation, while maintaining the target's surface cleanliness and preventing resin contact, thus enhancing storage and shipping protection.
Implementation Method 1
a device for performing vacuum suction to the inside of the bag
Data Source
AI summary
Provided are a packaging device and packaging method of a hollow cathode sputtering target which installs, in the hollow cathode sputtering target, a cover of a size capable of covering a void of the target; provides one or more through-holes to the cover; places a resin bag over them, and performs vacuum suction to the inside of the bag. This packaging device and packaging method of a hollow cathode sputtering target is capable of performing vacuum suction even to the inside of the hollow portion covered with the resin bag.