Hollow Diamond Shell Fabrication via CVD and Etching
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Solution Overview
Problem
Conventional chemical vapor deposition (CVD) methods cannot deposit diamond films on the entire surface of substrates due to contact with deposition equipment, and have not been able to produce hollow diamond shells.
Innovation Solution
A method involving preparing a matrix with a specific shape, synthesizing diamond films on its surface using CVD, and then etching the matrix to create fully or partially covered diamond/matrix composites, including hollow diamond shells, by ensuring all surfaces are exposed to the plasma and using controlled etching processes.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If CVD method deposits diamond films on substrates placed on a plate or stage, then diamond films can be synthesized on substrates, but the entire surface of substrates cannot be covered because a part contacts with the plate or stage
Solution Approach 1:
The invention extracts the substrate from contact with the deposition plate/stage by suspending it using a holder that allows the substrate to be positioned above the plate surface, enabling complete surface exposure to the diamond-containing plasma and achieving full surface coverage
Solution Approach 2:
The invention introduces dynamic movement by vibrating or rotating the substrate during deposition, ensuring all surfaces are continuously exposed to the plasma and preventing any region from remaining uncovered due to geometric shadowing effects
2Adaptability or versatility
If conventional CVD methods are used with substrates on plates or stages, then deposition process is simple, but hollow diamond shells cannot be produced
Solution Approach 1:
The invention applies preliminary action by first depositing a diamond film on a sacrificial core structure, then removing the core through etching to create hollow shells. This two-stage process enables complex hollow structures to be manufactured systematically
Solution Approach 2:
The invention uses a sacrificial core structure as an intermediary that facilitates the formation of hollow diamond shells. The core serves as a temporary template during deposition, is then removed by etching, leaving the desired hollow structure without requiring direct complex shaping of the diamond material itself
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables the fabrication of diamond/matrix composites and hollow diamond shells with controlled size and morphology, suitable for applications in biochips, field emission displays, and controlled release systems, such as pharmaceuticals and cosmetics.
Implementation Method 1
making a diamond/matrix composite by synthesizing a diamond film on the surface of the matrix by CVD method
Implementation Method 2
By vibrating the matrix, the surface of the matrix can be covered fully with diamond films
Implementation Method 3
A diamond/matrix composite with being partially uncovered with a diamond can be a diamond shell through etching the matrix out of the composite
Data Source
AI summary
This invention provides a method for fabricating geometrical diamond/matrix composites where all or a part of surfaces of the matrix are covered with a diamond film, and to fabricate hollow diamond shells using the composites where a part is uncoated with a diamond film. Hollow diamond shells were prepared by etching out of the matrix soluble with chemicals through an opening, a zone on the matrix, uncoated with diamond film. By changing the shape and the size of the geometrical matrixes, various kinds of diamond/matrix composites and diamond shells in shape and in size can be fabricated. The sizes available are between 200 nm and 2 mm.