Hollow Laser Beam Plasma Source Centering
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Plasma light sources face issues with low condensing efficiency and intensity due to non-circular or off-center plasma generation, caused by laser-induced plasma not having a circular shape and being generated near the chamber wall rather than the center, leading to scattered reflections and light loss.
Innovation Solution
A plasma light source apparatus and method that includes a chamber filled with plasma source gas, a laser generating part to produce a hollow laser beam, and a curved mirror to reflect and condense the beam, ensuring the plasma is generated at the center of the chamber, with additional mirrors and lenses for calibration and condensation, transforming circular laser beams into hollow beams to enhance plasma density and light intensity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Shape
If a laser beam having a circular shape is incident on a curved mirror, then the laser can be reflected and condensed, but the laser induced plasma might not have a circular shape and may instead have a linear or an oval shape
Solution Approach 1:
The patent applies asymmetry by transforming a circular laser beam into a hollow laser beam with an annular cross-section. This asymmetric beam profile, when reflected by the curved mirror, generates plasma with a circular shape and proper symmetry in the chamber center, resolving the shape distortion issue.
Solution Approach 2:
The patent changes the parameter of the laser beam from a solid circular profile to a hollow annular profile. This parameter transformation is achieved through optical elements that convert the beam structure, thereby enabling the curved mirror to generate properly shaped circular plasma at the chamber center.
2Power
If a laser beam is incident on a curved mirror, then plasma can be generated, but the laser induced plasma might not be generated at the center of a chamber, but near a chamber wall
Solution Approach 1:
The patent transitions from a simple circular laser beam to a hollow laser beam with an annular cross-section, adding structural dimensionality to the beam. This dimensional change in beam profile enables the curved mirror to focus the energy precisely at the chamber center, moving plasma generation from the chamber wall to the chamber center.
3Ease of manufacture
If plasma is generated near the chamber wall, then plasma can be formed, but setting a focus of a condensing lens may be difficult and condensing efficiency becomes low
Solution Approach 1:
The patent changes the laser beam parameter from circular to hollow annular shape, which fundamentally alters how the beam interacts with the curved mirror. This parameter change enables precise focusing at the chamber center, making the focus setting straightforward and achieving high condensing efficiency, thereby resolving both the ease of manufacture and productivity contradictions.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution achieves high-density plasma generation with improved light intensity and condensing efficiency by ensuring the plasma is circularly shaped and centered, reducing light loss and enhancing the plasma light source's performance.
Implementation Method 1
The curved mirror is configured to reflect and to condense the generated hollow laser beam to generate the laser induced plasma in the chamber
Implementation Method 2
The curved mirror is configured to reflect light emitted from the generated laser induced plasma
Data Source
AI summary
A plasma light source apparatus is provided. The plasma light source apparatus includes a chamber, a laser generating part, and a curved mirror. The chamber includes a plasma source gas for generating laser induced plasma. The laser generating part is spaced apart from the chamber and generates a hollow laser beam. The curved mirror is disposed between the chamber and the laser generating part. The curved mirror is configured to reflect and to condense the generated hollow laser beam into the chamber to generate the laser induced plasma in the chamber, and to reflect light emitted from the generated laser induced plasma.