Hollow Waveguide Mode Conversion for Low-Loss Fiber Coupling

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Solution Overview

Problem

Existing optical devices face challenges in achieving low coupling loss and high reliability when coupling SiPh-PICs to optical fibers, due to mismatched mode diameters and polarized light dependence, which complicates the manufacturing process and increases costs.

Innovation Solution

The optical integrated device features a hollow structure optical waveguide with a dent portion near the dicing line, allowing for efficient mode diameter conversion and stable optical coupling without damaging the SiO2 waveguide during dicing, thereby reducing optical coupling loss and ensuring high reliability.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If a lens coupling technique is used to increase the mode diameter of the optical coupler, then the mode diameter can be increased to match the normal diameter of single mode fiber, but the device area increases and manufacturing complexity increases due to additional steps for adjusting the optical axis and needing special adjustment devices

Engineering Contradiction:
Improvemode diameter matchingVSAvoidoptical system structure
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The invention extracts and removes the lens component from the optical coupling system. Instead of using a lens to expand the mode diameter, the patent employs a mode diameter conversion structure (such as an inverse tapered waveguide or adiabatic taper) that is integrated directly into the optical coupler chip. This eliminates the need for separate lens adjustment steps and special adjustment devices, thereby reducing device complexity while maintaining the ability to match mode diameters between the optical coupler and single mode fiber.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The invention merges the mode diameter conversion function directly into the optical coupler waveguide structure. The inverse tapered waveguide or adiabatic taper is fabricated as an integral part of the optical coupler chip using standard CMOS or SiPh processes, combining the coupling function and mode conversion function into a single integrated structure. This eliminates the need for separate lens components and adjustment mechanisms, reducing both device area and manufacturing complexity.

Inventive Principle:
Principle #5Merging (Combining)

2Manufacturing precision

If a lens coupling technique is used, then the mode diameter can be increased to match the normal diameter of single mode fiber, but the device area increases making small sized module implementation difficult

Engineering Contradiction:
Improvemode diameter matchingVSAvoiddevice area
Core Design Contradiction:
Manufacturing precisionVSArea of stationary object

Solution Approach 1:

The invention extracts and removes the lens component from the optical coupling system. Instead of using a lens to expand the mode diameter, the patent employs a mode diameter conversion structure (such as an inverse tapered waveguide or adiabatic taper) that is integrated directly into the optical coupler chip. This eliminates the need for separate lens adjustment steps and special adjustment devices, thereby reducing device complexity while maintaining the ability to match mode diameters between the optical coupler and single mode fiber.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The invention uses an inverse tapered waveguide or adiabatic taper that expands the mode diameter gradually along the propagation direction (one dimension) rather than requiring a two-dimensional lens structure. This allows mode diameter conversion to occur within the waveguide itself as light propagates through the tapered section, achieving mode matching without increasing the lateral device area, thus enabling compact module implementation.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

3Ease of manufacture

If an inverse tapered spot size converter structure is used, then the structure can be fabricated easily using only Si waveguide, but the mode diameter cannot be increased to nearly the mode diameter of single mode fiber and excessive loss occurs in fusion welding portion

Engineering Contradiction:
Improvefabrication simplicityVSAvoidmode diameter conversion efficiency
Core Design Contradiction:
Ease of manufactureVSManufacturing precision

Solution Approach 1:

The invention employs composite material structures for the mode diameter conversion section. Instead of using only Si waveguide, the patent utilizes combinations such as Si-SiO2 composite waveguides or SiN-SiO2 composite structures. These composite materials allow for better control of the refractive index profile and mode field distribution during the tapering process, enabling more efficient mode diameter conversion to match single mode fiber dimensions while maintaining fabrication compatibility with standard semiconductor processes.

Inventive Principle:
Principle #40Composite materials

4Device complexity

If the SiPh-PIC is directly connected to the optical fiber, then the structure is simple, but a large optical loss occurs due to mismatch with the mode diameter

Engineering Contradiction:
Improvecoupling structureVSAvoidoptical coupling loss
Core Design Contradiction:
Device complexityVSLoss of energy

Solution Approach 1:

The invention performs preliminary mode diameter conversion within the optical coupler chip before the light exits to the optical fiber. The inverse tapered waveguide or adiabatic taper pre-expands the mode diameter of the Si waveguide to match the larger mode diameter of the single mode fiber. This preliminary action ensures that when the light exits the chip and enters the fiber, the mode fields are already well-matched, minimizing coupling loss without requiring complex external coupling structures.

Inventive Principle:
Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution enables efficient optical coupling with minimal loss and high reliability, allowing for the connection of optical fibers with normal diameters, while also simplifying the manufacturing process and reducing costs.

Implementation Method 1

The optical waveguide converts a mode diameter to a mode diameter of an optical fiber in accordance with travelling of light from the first optical waveguide to the second optical waveguide

Methodology Applied
Scientific EffectMode diameter conversion: Waveguide (optics)

Implementation Method 2

The second optical waveguide is optically coupled to the first optical waveguide and has a relative refractive index difference that is smaller than a relative refractive index difference of the first optical waveguide

Methodology Applied
Scientific EffectRefraction: Refraction

Data Source

PatentUS12313880B2Optical integrated device, optical integrated circuit wafer, and method of manufacturing the optical integrated device
Publication Date: 2025.05.27 FUJITSU OPTICAL COMPONENTS LTD
  • US12313880B2 patent drawing
  • US12313880B2 patent drawing
  • US12313880B2 patent drawing

AI summary

An optical integrated device includes a substrate and a waveguide that has a hollow structure. The waveguide includes a first waveguide and a second waveguide that is optically coupled to the first waveguide and that has a smaller relative refractive index difference than that of the first waveguide and converts a mode diameter to a mode diameter of an optical fiber in accordance with travelling of light. The optical integrated device includes a dent portion that is formed in the vicinity of the dicing line on the substrate such that the width of the output end surface is smaller than the core width of the optical fiber that is optically coupled to the output end surface in the state in which the dicing end surface of the substrate protrudes farther than the output end surface of the second waveguide in the axial direction of the optical waveguide.