Digital Holography 3D Shape Reconstruction via Aberration Correction
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Solution Overview
Problem
Existing digital holography microscopes require complex optical device structures and are costly, limiting their ability to accurately measure 3D shapes of objects in real time, especially for ultra-fine structures like TFTs and semiconductors, and they often rely on reference holograms which add complexity.
Innovation Solution
A method and device that generate 3D shape information from a single hologram image by extracting real image components, generating correction light and holograms to correct for curvature aberrations, and using a digital reference light to reconstruct the object's shape without a reference hologram, allowing for real-time, cost-effective defect detection in both reflection-type and transmission-type hologram reconstruction.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If digital holography microscopes use complex optical device structures to achieve accurate 3D shape measurement, then measurement precision is improved, but device complexity and manufacturing cost increase
Solution Approach 1:
The patent extracts and removes the reference hologram component from the holographic measurement system. By using only the object hologram without requiring a reference hologram, the system eliminates complex optical paths and components needed for reference light generation and combination, thereby simplifying the optical device structure while maintaining 3D shape measurement capability
Solution Approach 2:
The patent uses computational methods to reconstruct the 3D shape information from the object hologram alone, replacing the need for physical optical reference paths with digital signal processing algorithms. This copying approach transfers the measurement function from complex optical hardware to computational software, reducing device complexity
2Measurement precision
If digital holography microscopes use reference holograms to improve measurement accuracy, then measurement precision is improved, but device complexity and cost increase
Solution Approach 1:
The patent extracts and removes the reference hologram requirement from the measurement system. By demonstrating that accurate 3D shape measurement can be achieved using only the object hologram with appropriate computational processing, the system eliminates the need for expensive reference hologram recording equipment and simplifies the overall manufacturing process
Solution Approach 2:
The patent replaces expensive, complex optical components needed for reference hologram systems with more economical digital processing methods. The computational approach using standard image processing algorithms and basic optical components reduces manufacturing costs while achieving comparable measurement accuracy
3Productivity
If digital holography microscopes use complex optical structures to enable real-time 3D reconstruction, then productivity is improved, but device complexity increases
Solution Approach 1:
The patent replaces complex mechanical-optical systems with digital computational methods. By using digital signal processing and image processing algorithms to reconstruct 3D shapes from object holograms alone, the system achieves real-time reconstruction capability without the complex optical mechanisms traditionally required, thereby improving productivity while reducing device complexity
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables accurate, real-time 3D shape reconstruction and defect detection in ultra-fine structures with a simple and cost-effective structure, reducing manufacturing costs and improving defect detection accuracy.
Implementation Method 1
an object hologram generated by interference between a reference light reflected from an optical mirror and an object light reflected from or passing through the object
Data Source
AI summary
A method of generating three-dimensional (3D) shape information of an object to be measured from an image including intensity information of an object hologram generated by interference between a reference light reflected from an optical mirror and an object light affected by the object includes checking at least one frequency component included in the image and extracting real image components corresponding to a real image from the frequency component. The method also includes generating a correction light and a real image hologram based on the real image components, generating an intermediate hologram based on the correction light, and generating curvature aberration correction information from the intermediate hologram. The method further includes generating a correction hologram based on the curvature aberration correction information and generating the 3D shape information of the object from the correction hologram.