Holweck Vacuum Pump Inlet Channel Tapping
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing split-flow vacuum pumps with Holweck pump stages lack flexibility in tapping configurations, relying on transitions between consecutive stages, which limits adaptability to different requirements and pressure settings.
Innovation Solution
The vacuum pump design includes a further inlet opening into the Holweck pump region on the radially inner Holweck stator, allowing tapping downstream of the transition area between Holweck stages, providing flexibility in axial positioning and enabling tapping regardless of direct stage succession, with concentrically arranged Holweck stages and varying groove base diameters for enhanced conductance.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If the inlet channel opens into the Holweck pump region at the transition area between consecutive stages, then the structure is simplified and manufacturing is easier, but the adaptability to different pressure settings and tapping configurations is limited
Solution Approach 1:
The invention segments the Holweck pump region into distinct zones: the transition area between consecutive stages and the downstream area on the radially inner stator. By providing separate inlet channel options opening into these distinct zones, the system achieves multiple tapping configurations without requiring complete structural redesign, thus improving adaptability while maintaining manufacturing simplicity.
Solution Approach 2:
The invention introduces axial positioning dimension by allowing the inlet channel to open into the Holweck pump region at different axial locations - either at the transition area or downstream on the radially inner stator. This dimensional flexibility enables multiple pressure settings and tapping configurations without increasing radial or circumferential complexity, resolving the contradiction between ease of manufacture and adaptability.
2Adaptability or versatility
If the inlet channel opens into the radially inner Holweck stator downstream of the transition area, then flexible pressure control and conductance values are achieved, but the structural complexity increases
Solution Approach 1:
The radially inner Holweck stator serves multiple functions: it acts as both a structural component of the Holweck pump stage and as an opening surface for the inlet channel. By integrating the inlet channel opening into the existing stator structure rather than adding a separate component, the system achieves flexible pressure control without proportionally increasing structural complexity.
Solution Approach 2:
The invention applies local quality by creating a specific opening in the radially inner Holweck stator at a location optimized for conductance values. This localized modification allows flexible pressure control at the downstream position without requiring changes to the entire stator structure or adding complex routing mechanisms, thus achieving adaptability with minimal structural complexity increase.
3Productivity
If multiple Holweck pump stages are arranged concentrically with varying groove base diameters, then conductance values are enhanced, but the manufacturing precision requirements increase
Solution Approach 1:
The invention optimizes the groove base diameter parameter of the Holweck stator to achieve enhanced conductance values. By carefully selecting and varying this geometric parameter across different pump stages, the system improves pumping performance. The parameter change is implemented within standard manufacturing tolerances, balancing productivity enhancement with achievable manufacturing precision.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration achieves high conductance values and flexible pressure control, enabling effective pumping across multiple inlets and stages without dependency on direct stage transitions, thus improving overall pumping performance.
Implementation Method 1
each generate a molecular flow by rotating a Holweck rotor relative to one or more Holweck stators
Implementation Method 2
The gas molecules to be conveyed are conveyed by the rotating movement of the Holweck rotor relative to the Holweck stator along the threads from an inlet to an outlet
Implementation Method 3
The Holweck stator is provided with a single or multi-start Holweck thread. The gas molecules to be conveyed are conveyed by the rotating movement of the Holweck rotor relative to the Holweck stator along the threads from an inlet to an outlet
Implementation Method 4
In order to minimize backflow losses, the width of the radial gap (Holweck gap) between the top of the web, i.e. the web tip, and the rotor sleeve is kept small
Data Source
Figure 1
Figure 2
Figure 3
AI summary
The invention relates to a vacuum pump, in particular a turbomolecular vacuum pump, with an inlet, an outlet, a housing enclosing a pumping chamber for a gas to be pumped from the inlet to the outlet in a pumping direction, and at least one Holweck pumping stage comprising at least one Holweck stator and at least one Holweck rotor rotating about an axis of rotation during operation and, together with the Holweck stator, defining a Holweck pumping area, wherein the Holweck pumping area has an axial length with respect to the axis of rotation, comprising a first axial end and a second axial end, wherein at least one further inlet for gas to be pumped is provided, which leads via an inlet channel to an opening of the further inlet formed in the Holweck stator in the Holweck pumping area, wherein the opening is located in the axial direction between the first axial end and the second axial end of the Holweck pumping area.and wherein the inlet channel includes at least one outlet section formed in the Holweck stator and leading to the outlet in the Holweck pump area.