Homogenizing Illumination Element with Polarization Control

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Solution Overview

Problem

Existing solutions fail to efficiently homogenize illumination while simultaneously setting the polarization degree for an optical system's pupil, particularly in achieving structured illumination.

Innovation Solution

A dual-component element comprising a microlens array and a polarization filter, where the filter can be oriented for linear, radial, tangential, or circular polarization, allowing for adjustable polarization based on the substrate's structure, and can be fixedly connected to or replaceable within the optical path.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Device complexity

If a single component is used for illumination homogenization, then the device complexity is reduced, but the ability to simultaneously set polarization degree is lost

Engineering Contradiction:
Improveelement structureVSAvoidpolarization setting capability
Core Design Contradiction:
Device complexityVSAdaptability or versatility

Solution Approach 1:

The patent combines a microlens array and a polarization filter into a single integrated element that performs both illumination homogenization and polarization setting functions simultaneously. This merging of functions resolves the contradiction by maintaining device simplicity while achieving the dual capability of homogenization and polarization control.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The integrated element is designed to perform multiple functions: the microlens array component handles illumination homogenization while the polarization filter component simultaneously sets the polarization degree. This multi-functionality allows a single element to replace what would traditionally require separate components, reducing overall device complexity while maintaining versatility.

Inventive Principle:
Principle #6Universality (Multi-functionality)

2Device complexity

If the polarization filter is fixedly connected to the microlens array, then the element structure is simplified, but the ease of replacement and adjustment is reduced

Engineering Contradiction:
Improveelement structureVSAvoidfilter replaceability
Core Design Contradiction:
Device complexityVSEase of repair

Solution Approach 1:

The element is segmented into distinct functional components - a microlens array and a polarization filter - that can be independently designed, manufactured, and replaced. This segmentation allows the filter to be easily swapped out for adjustment or replacement without affecting the microlens array, resolving the contradiction between structural simplicity and ease of maintenance.

Inventive Principle:
Principle #1Segmentation

3Ease of operation

If the polarization filter is made replaceable, then the ease of operation and adjustment is improved, but the device complexity increases

Engineering Contradiction:
Improvefilter adjustabilityVSAvoidelement structure
Core Design Contradiction:
Ease of operationVSDevice complexity

Solution Approach 1:

By segmenting the element into a microlens array and a separate polarization filter, the design enables easy replacement and adjustment of the filter component. This segmentation allows users to swap filters for different polarization characteristics without replacing the entire element, improving ease of operation while keeping the overall structure relatively simple.

Inventive Principle:
Principle #1Segmentation

4Manufacturing precision

If the filter is designed for specific polarization orientation, then the polarization setting precision is improved, but the adaptability to different substrate structures is reduced

Engineering Contradiction:
Improvepolarization orientationVSAvoidsubstrate structure compatibility
Core Design Contradiction:
Manufacturing precisionVSAdaptability or versatility

Solution Approach 1:

The separable design allows the polarization filter to be independently selected and replaced based on the specific substrate structure being processed. Users can choose filters with appropriate polarization orientations (linear, circular, radial, tangential) to match the substrate requirements, achieving both precision for specific applications and adaptability across different substrate types.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The system enables parameter changes in polarization orientation by allowing users to replace filters with different polarization characteristics. This can be done by changing the filter's polarization angle, circularity, or other parameters to match the specific needs of different substrate structures, thereby achieving both precision and versatility.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables simple and effective homogenization of illumination with controlled polarization, ensuring consistent polarization across the pupil of an optical system, enhancing imaging quality by aligning polarization with the optical system's structure.

Implementation Method 1

The first component includes a microlens array

Methodology Applied
Scientific EffectLens focusing: Lens

Implementation Method 2

The second component consists of a filter used for setting the desired polarization

Methodology Applied
Scientific EffectPolarization: Polarisation

Data Source

PatentUS8390927B2Element for homogenizing the illumination with simultaneous setting of the polarization degree
Publication Date: 2013.03.05 VISTEC SEMICON SYST
  • US8390927B2 patent drawing
  • US8390927B2 patent drawing
  • US8390927B2 patent drawing

AI summary

Element for homogenizing the illumination with simultaneous setting of the polarization degree, wherein the element consists of at least two components. The first component is a microlens array, and the second component is a filter for setting the desired polarization.